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TECHNICAL INFORMATION

8

0 87-900-929-01 (

H

)

USE

General

Make all vacuum manifold and electrical connections and
refer to Turbo-V ICE pump instruction manual before to
operating the Turbo-V ICE contr oller.

!

To avoid injury to personnel and damage to the
equipment, if the pump is laying on a table make sure it
is steady. Never operate the Turbo-V ICE pump if the
pump inlet is not connected to the system or blanked
off.

CAUTION!

The pump is factory set with Argon process gas. To
avoid pump failures, do not select Air if the pump is
used with heavy gases.

NOTE

The input signal P1 connector should be left in position
including the shipping links if no external connections
are made. The forepump and the
Turbo-V ICE pump can be switched on at the same
time.

NOTE

When the Turbo-V 2000 ICE pump is baked by a
membrane pump, the Soft Start mode should be
deselected.

Startup

  Plug the controller power cable into a suitable power

source.

  The display lights, and shows:

A U T O T E S T

C H E C K

NOTE

The above message is only displayed when a board
with optional serial ports is installed.

A U T O T E S T

O K

R E A D Y

F O R

L O C A L

S O F

T

S T A R T

H S

The controller with the Soft Start mode allows the pump to
ramp-up to Normal Speed slowly with a minimum ramp-up
time of 80 minutes and a maximum of about 110 minutes.
The Soft Start mode is always operative as default mode. If
it is necessary to deselect this mode refer to the following
paragraph.
If the Soft Start mode is deselected, the ramp- up will be
done within 10 minutes and the display changes as
follows:

P U M P

R E A D Y

:

P U S H

S T A R T

B U T

T O N

H S

NOTE

If the pump is not connected, the display will be as shown :

C H E C K

C O N N E C T

I

O N

T O

P U M P

H S

NOTE

After pressing the START push-button, if the P1
connector is not in place with the link or the external
interlock connection are open, the display will be as
shown in the following figure.

P U M P

W A

I

T

I

N G

I

N T E R L O C K

Unplug the controller power cable and verify the P1
connection according to paragraph “Interconnections”.

WARNING!

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Summary of Contents for Turbo-V 2000 ICE

Page 1: ...derutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos In s...

Page 2: ...NG ISTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SIKIRJA FELHASZN L I K ZIK NYV PODRECZNIK INSTRUKCJI N VOD K POU IT N VOD NA OBSLUHU PRIRO NIK ZA NAVODILA INSTRUCTION MANUAL Turbo V 2000 IC...

Page 3: ...Turbo V 2000 ICE Controller Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 4: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 5: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 6: ...SE 65 TECHNICAL INFORMATION 69 TURBO V 2000 ICE CONTROLLER DESCRIPTION 69 CONTROLLER SPECIFICATIONS 70 CONTROLLER OUTLINE 71 FUSE HEATER JACKET 72 INTERCONNECTIONS 72 Connection J1 Logic Input Output...

Page 7: ...6 Message Structure 76 Window Based Protocol 79 USE 80 General 80 Startup 80 Front Remote Serial Selection 81 Starting the Pump 86 Monitor Relay Programming 87 Pump Shutdown 87 Power Failure 87 Operat...

Page 8: ...ia purge valve Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante L utilizzo dell apparecchiatura Informazioni dettagliate sono forn...

Page 9: ...a appoggiata su di un tavolo assicurarsi che sia stabile Non fare funzionare mai la pompa se la flangia di ingresso non collegata al sistema o non chiusa con la flangia di chiusura NOTA Il connettore...

Page 10: ...iminazione nel rispetto delle normative nazionali specifiche MESSAGGI DI ERRORE In alcuni casi di guasto la circuiteria di autodiagnosi del controller presenta alcuni messaggi di errore elencati nella...

Page 11: ...uperato i 90 C Attendere che la temperatura ritorni al di sotto della soglia Premere due volte il pulsante START per riavviare la pompa FAULT TOO HIGH LOAD Durante il funzionamento normale la corrente...

Page 12: ...en f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sic...

Page 13: ...f einem Tisch mu auf den stabilen Stand geachtet werden da sonst die Gefahr von Personen und Ger tesch den besteht Die Pumpe nie einschalten wenn der Eingangsflansch nicht am System angeschlossen bzw...

Page 14: ...In einigen St rungsf llen zeigt das Selbstdiagnoses system des Controllers die in der nach stehenden Tabelle zusammengefa ten Meldungen an 1 Stecker Eingang Ausgang f r logische Signale und berpr fun...

Page 15: ...Warten bis die Temperatur unter den Schwellenwert gesunken ist Die Pumpe durch zweimalige Bet tigung der START Taste neustarten FAULT TOO HIGH LOAD W hrend des Normalbetriebs nach der Startphase ist d...

Page 16: ...alve Les paragraphes suivants donnent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l...

Page 17: ...re est stable Ne jamais faire fonctionner la pompe si la bride d entr e n est pas connect e au syst me ou si elle n est pas ferm e l aide de la bride de serrage NOTE Laisser le connecteur de r enclen...

Page 18: ...es en la mati re MESSAGES D ERREUR Dans certains cas de panne l ensemble de circuits d autodiagnostic du contr leur pr sente certains messages d erreur indiqu s dans le tableau ci dessous 1 Connecteur...

Page 19: ...que la temp rature retourne au dessous du seuil Presser deux fois l interrupteur START pour remettre la pompe en marche FAULT TOO HIGH LOAD Au cours du fonctionnement normal le courant consomm par la...

Page 20: ...rge valve En los apartados siguientes se facilita toda la informaci n necesaria para garantizar la seguridad del operador durante el uso del equipo Una informaci n m s detallada se facilita en el Supl...

Page 21: ...orarse que es estable No poner en marcha nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre NOTA El conector di cierre P1 ha de dejarse conectado...

Page 22: ...do las normas nacionales espec ficas MENSAJES DE ERROR En algunos casos de aver a los circuitos de autodiagnosis del controler presenta algunos mensajes de error detallados en la tabla siguiente 1 Con...

Page 23: ...eratura vuelva por debajo del umbral Apretar dos veces el pulsador START para volver a poner en marcha la bomba FAULT TOO HIGH LOAD Durante el funcionamiento normal tras la fase de puesta en marcha la...

Page 24: ...a purge valve Nos par grafos seguintes est o descritas todas as informa es necess rias para garantir a seguran a do operador durante o uso da aparelhagem Informa es pormenorizadas s o fornecidas no ap...

Page 25: ...ada numa mesa certificar se que esteja est vel Nunca activar a bomba se o flange de entrada n o estiver ligado ao sistema ou n o estiver fechado com o flange de fecho NOTA O conector de fecho P1 deve...

Page 26: ...ua elimina o respeitando as normas nacionais espec ficas MENSAGENS DE ERRO Em alguns casos de defeitos os circuitos de autodiagn stico do controller apresentam mensagens de erro relacionadas na tabela...

Page 27: ...ontroller superou os 90 C Aguardar at que a temperatura volte ao limite estabelecido Premer duas vezes o bot o START para reactivar a bomba FAULT TOO HIGH LOAD Durante o funcionamento normal a corrent...

Page 28: ...ngsmeter en regelsignalen van de reinigingsklep purge valve In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Ge...

Page 29: ...e pomp nooit werken zonder dat de ingangsflens aan het systeem is gekoppeld of de afsluitflens is gesloten OPMERKING De connector P1 moet met zijn jumper aangesloten blijven als geen externe aansluiti...

Page 30: ...de specifieke nationale wetgeving te werk FOUTMELDINGEN In geval van bepaalde storingen wekt het zelfdiagnose circuit van de controller enkele foutmeldingen op die in de tabel op de volgende bladzijd...

Page 31: ...ontroller bedraagt meer dan 90 C Wacht tot de temperatuur weer onder de drempelwaarde is gezakt Bedien twee maal de START knop om de pomp weer op te starten FAULT TOO HIGH LOAD Tijdens normale werking...

Page 32: ...gende afsnit indeholder al information der er n dvendig for at garantere operat rens sikkerhed i forbindelse med anvendelse af udstyret Detaljeret information findes i bilaget Technical Information I...

Page 33: ...eret p et bord Dette er for at forebygge skader p apparatet og personer Start aldrig pumpen hvis pumpetill bet ikke er tilsluttet systemet eller er blokeret BEM RK Afbryderkontakten P1 skal forblive t...

Page 34: ...nde lands s rlige love FEJLMEDDELELSER N r visse fejl opst r viser styreenheden ved selvdiagnose aktuelle fejl p displayet De mulige meddelelser beskrives i tabellen p f lgende side 1 Input output kon...

Page 35: ...transformator er over 90 C Vent p at temperaturen falder til under t rskelv rdi Tryk to gange p START for at starte pumpen igen FAULT TOO HIGH LOAD Under normal drift er pumpens str mforbrug st rre e...

Page 36: ...nitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under driften Detaljerade uppgifter finns i bilagan Technical information I bruksanvisningen anv nds f ljande standa...

Page 37: ...bygga skador p apparaten och personer S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till systemet eller r blockerad p plats med l sfl nsen OBSERVERA St ngningskontakten P1 m ste l mnas an...

Page 38: ...tyrenhetens sj lvdiagnoskrets aktuellt felmeddelande p displayen De m jliga meddelandena listas i f ljande tabell 1 Ing ngs utg ngskontaktdon f r logiska signaler och kontroll av effekten till pumpen...

Page 39: ...Temperaturen p styrenhetens transformator verskrider 90 C V nta tills temperaturen sjunker under tr skelv rdet Tryck tv g nger p knappen START f r att starta om pumpen FAULT TOO HIGH LOAD Under norma...

Page 40: ...gende avsnittene inneholder all informasjon som er n dvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information Denne veiledningen bruker f...

Page 41: ...orhindre skader p apparatet og p personer Dersom inngangsflensen hverken er tilkoplet systemet eller dersom den er blokkert av l seflensen m pumpen aldri startes opp MERK Lukkekontakten P1 m v re tilk...

Page 42: ...osekretsen i styreenheten den aktuelle feilmeldingen i displayet De aktuelle feilmeldingen fremg r av tabellen nedenfor 1 Inngangs utgangskoplingsstykke for de logiske signalene og kontroll av kraften...

Page 43: ...formator er over 90 C Vent til temperaturen synker under terskelverdien Trykk to ganger p knappen START for starte pumpen FAULT TOO HIGH LOAD Ved normal drift har pumpen et str mforbruk som er h yere...

Page 44: ...lin ohjaussignaaleja Seuraavissa kappaleissa on kaikki tarpeelliset tiedot k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t liitteest Technical Informatio...

Page 45: ...se on vakaa N in v ltyt n vammoilta ihmisille sek itse koneelle lk my sk n k ytt k pumppua mik li sis ntulon laippaa ei ole kytketty j rjestelm n tai mik li sit ei ole suljettu laippasulkijalla HUOM...

Page 46: ...imikaa sen h vitt misess kansallisten s d sten ja normien m r m ll tavalla VIANETSINT Joidenkin toimintah iri iden yhteydess valvojan itsem rittelypiiri analysoi virheen joka n kyy viestein jotka on k...

Page 47: ...C tta Odottakaa ett l mp tila palaa kynnysarvon alapuolelle Painakaa START painonappia kaksi kertaa jolloin pumppu k ynnistyy FAULT TOO HIGH LOAD Normaality skentelyn aikana k ynnistysvaiheen j lkeen...

Page 48: ...ovmene paragravfou anafevrontai ovle oi aparaivthte plhroforive pou egguouvntai thn asfavleia tou ceiristhv katav th diavrkeia th crhsimopoivhsh th suskeuhv Leptomereiv plhroforive parevcontai sto par...

Page 49: ...i eivnai kalav staqeropoihmevnh Mhn qevtete se leitourgiva thn antliva an h flavntza eisovdou den eivnai sundedemevnh sto suvsthma hv an den eivnai kleisthv me thn flavntza kleisivmato SHMEIWSH O sund...

Page 50: ...thn katastrofhv tou ruqmisthv akolouqhvste ovti anafevrete stou eqnikouv kanonismouv MHNUMATA LAQOUS Se orismevne periptwvsei blavbh ta kuklwvmata autodiavgnwsh tou ruqmisthv parousiavzoun orismevna m...

Page 51: ...v shmeivo Pathvste duvo forev to koumpiv START gia na qevsete xanav se kivnhsh thn antliva FAULT TOO HIGH LOAD Katav thn kanonikhv leitourgiva metav th favsh ekkivnhsh to aporrofouvmeno reuvma apov th...

Page 52: ...kat az ismereteket melyek a kezel biztons g t hivatottak garant lni a berendez s haszn lata sor n R szletes inform ci k tal lhat k a Technical Information c m mell kletben E k zik nyv az al bbi megegy...

Page 53: ...ben val k rok elker l se rdek ben biztos tani kell az asztal stabilit s t Soha nem szabad a szivatty t a bementi peremnek a rendszerhez val csatlakoztat sa vagy a z r peremmel val lez r sa n lk l zeme...

Page 54: ...tezni megsemmis t sekor a t rgyk rbe tartoz nemzeti norm knak megfelel en kell elj rni HIBA ZENETEK N h ny meghib sod si esetben a vez rl ndiagnosztikai ramk rei hiba zenetet jelen tenek meg l sd az a...

Page 55: ...90 C t V rakozni m g a h m rs klet a k sz b rt k al esik A szivatty jraind t s hoz k tszer megnyomni a START nyom gombot FAULT TOO HIGH LOAD Norm l zem k zben a szivatty ltal felvett ram nagyobb a pro...

Page 56: ...t sygnaly kontrolujace fluksometr i te sluzace do W nastepnych paragrafach zawarte sa wszystkie niezbedne informacje dotyczace gwarancji bezpieczenstwa personelu obslugujacego urzadzenie Bardziej szcz...

Page 57: ...jezeli kolnierz wejsciowy nie jest polaczony z systemem lub nie jest zamknieta kolnierzem zamykajacym PRZYPIS W przypadku kiedy nie zostanie wykonane zadne polaczenie zewnetrzne lacznik zamykajacy P1...

Page 58: ...ia nalezy przeprowadzic operacje respektujac krajowe specyficzne normy BLEDNE INFORMACJE W niektorych przypadkach uszodzen obwod do autodiagnozy kontrolera pokazuje blendne informacje przyklady sa wym...

Page 59: ...atura sie obnizy ponizej ustalonego poziomu Nacisnac dwa razy przycisk START dla ponownego uruchomienia pompy FAULT TOO HIGH LOAD Podczas normalnej pracy po fazie rozruchu zuzycie pradu przez pompe je...

Page 60: ...eduj c ch odstavc ch jsou uvedeny ve ker nutn informace t kaj c se oper tora a bezpe nostn ch podm nek b hem provozu p stroje Podrobn informace se nach zej v dodatku Technical Information Tato p ru ka...

Page 61: ...rozit osoby i p stroj mus se zkontrolovat jeho stabilita v p pad e erpadlo je polo en na stole Jestli e vstupn p ruba nen napojen na syst m nebo nen uzav en se zav raj c p rubou erpadlo se nesm spusti...

Page 62: ...h norem CHYBN ZPR VY V n kter ch p padn ch poruch ch na autodiagnostick ch obvodech kontrol r p ed v n kolik chybn ch odkaz kter jsou vyjmenov ny v tabulce kter se nach z na n sleduj c str nce 1 Konek...

Page 63: ...rm tora kontrol ru p ekro ila 90 C Po kat a se temperatura op t vr t pod mezn hodnotu Stisknout dvakr t tla tko START pro op tn spu t n erpadla FAULT TOO HIGH LOAD B hem norm ln ho provozu spot eba pr...

Page 64: ...rietokomeru a sign ly pre riadenie istiaceho ventilu purge valve alej s pop san v etky potrebn inform cie ktor ch lohou je zabezpe i bezpe nos pracovn ka po as pou vania pr stroja Podrobn inform cie s...

Page 65: ...e iu a po kodeniu pr stroja skontrolujte aby erpadlo umiestnen na pracovnom stole bolo stabiln erpadlo nikdy nena tartujte vtedy ke vstupn pr ruba nie je napojen na syst m alebo nie je zavret s uz ver...

Page 66: ...n mi normami OZNAMY V D V niektor ch pr padoch t kaj cich sa v d obvod samodiagnostiky controller signalizuje nieko ko oznamov v d uveden ch na al ej strane 1 Spojka vstupu v stupu logick ch sign lov...

Page 67: ...a 90 C Po ka k m teplota neklesne pod hranicu Stla te dvakr t tla idlo START pre znovuna tartovanie erpadla FAULT TOO HIGH LOAD Po as be n ho chodu spotreba pr du erpadla je vy ia ako spotreba naprogr...

Page 68: ...ilne varovalke purge valve V naslednjih odstavkih so navedene vse informacije ki so potrebne za zagotavljenje sigurnosti uporabnika med rokovanjem s to napravo Podrobnej e informacije najdete v dodatk...

Page 69: ...palko stabilno polo ili e ste jo vgradili na mizi rpalka ne sme nikoli delovati e vhodna prirobnica ni priklopljena k sistemu ali e ni zaprta s zapiralno prirobnico OPOMBA Konektor za zapiranje P1 mor...

Page 70: ...v skladu z dr avnimi predpisi OBVESTILO O NAPAKI V nekaterih slu ajih kvara vezje avtodiagnoze controllera poka e nekaj obvestil o napakah kot so prikazane v tabeli na naslednji strani 1 Vhodni Izhod...

Page 71: ...atura transformatorja controllera je presegla 90 C Po akajte da se temperatura vrne pod normalnim vrednostnim pragom Dvakrat pritisnite tipko START za ponoven zagon rpalke FAULT TOO HIGH LOAD Med nava...

Page 72: ...arantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following conventions The warning messages are f...

Page 73: ...ng on a table make sure it is steady Never operate the Turbo V pump if the pump inlet is not connected to the system or blanked off NOTE The input signal P1 connector should be left in position includ...

Page 74: ...crapped it must be disposed off in accordance with the specific national standards ERROR MESSAGES For a certain type of failure the controller will self diagnose the error and the messages described i...

Page 75: ...ait until the temperature decrease below threshold value Press the START push button twice to start the pump FAULT TOO HIGH L0AD In normal operation the current drawn by the pump is higher than progra...

Page 76: ...digital section display and keyboard circuits The power supply converts the single phase 50 60 Hz AC mains supply into a 3 phase low voltage medium frequency output which is required to power the Turb...

Page 77: ...mA J2 semi specifications connector inputs outputs Minimum ON 3 mA Maximum 5 mA 24 Vdc 100 mA J7 output fan forepump coil etc 120 Vac 1A disregarding the mains J11 purge flow connector 12 Vdc power su...

Page 78: ...LLER OUTLINE The outline dimensions for the Turbo V 2000 ICE controllers are shown in the following figures Controller models 969 9448 and 969 9449 outline Artisan Technology Group Quality Instrumenta...

Page 79: ...TION 1 14 Remote START STOP S1 optically isolated from the internal circuit requires a permanently closed contact relay contact transistor etc When the contact closes the turbopump starts at high spee...

Page 80: ...nalog output Voltage of power drawn by the turbopump pin 12 positive pin 25 negative 10 Vdc proportional to 1000 W 13 25 Analog output voltage 0 10 V of pump speed pin 13 positive pin 25 negative 24 2...

Page 81: ...of the pump is higher than the selected high speed threshold 5 13 BRAKING signal 24 V 60 mA isolated relay output open collector The output is activated when the pump is in its deceleration phase with...

Page 82: ...Heater Jacket supply has the same value as the Mains Voltage applied to the controller OPTIONAL SERIAL PORT NOTE The Controller can be read when set in the Front Remote mode read window only enabled...

Page 83: ...etal shroud on the O subconnector The cable should be secured to the connector with screws RS 232 422 Communication Descriptions Communication RS 232 serial port connections Communication RS 422 seria...

Page 84: ...he slave answers a string equal to the one sent by the master but in addition there is the field DATA containing the value of the window The format of the field DATA depends to the window type The dif...

Page 85: ...ETX CRC Command FREQUENCY Source PC Destination Inverter 02 80 32 30 33 30 03 38 32 STX ADDR WINDOW RD ETX CRC Source Inverter Destination PC 02 80 32 30 33 30 30 30 30 30 33 33 03 38 32 STX ADD WIND...

Page 86: ...119 X X L HOST PRINTER MODE 0 HOST 1 PRINTER 200 X N CURRENT A 201 X N VOLTAGE V 202 X N POWER W 203 X N FREQUENCY Krpm 205 X N PUMP STATE 0 6 STOP WAITING INTERLOCK STARTING NORMAL HIGH LOAD FAILURE...

Page 87: ...C K NOTE The above message is only displayed when a board with optional serial ports is installed A U T O T E S T O K R E A D Y F O R L O C A L S O F T S T A R T H S The controller with the Soft Start...

Page 88: ...e Press the PUMP CURRENT push button and the display shows L A S T A L A R M X X X X X T X X X X X h C X X X X X Where Last alarm number of alarms sounded T Pump life span relating to the last alarm C...

Page 89: ...ation see the following cycle diagram and it is factory set to 23 KRPM Press the CYCLE NUMBER push button to select the first number Press the PUMP CURRENT push button and the display shows P U R G E...

Page 90: ...Soft Start mode may be deselected selected only when the pump is stopped Press CYCLE NUMBER push button to select YES or NO S O F T S T A R T M O D E S E L E C T I O N Y E S Press the PUMP CURRENT pus...

Page 91: ...ial card is installed Choose the desired selection by pressing the CYCLE push button F R O N T R E M O T E S E R S E L E C T I O N F R O N T Press PUMP CURRENT push button and the display shows S E R...

Page 92: ...blished by selecting HOST Data are sent to an external computer every time the external computer asks for the values The available data are listed in the read mode in the serial protocol table NOTE Wi...

Page 93: ...g mode must be selected NOTE With the FRONT panel operation selected the REMOTE and RS 232 422 485 operations are inoperative conversely the CYCLE NUMBER and PUMP CURRENT push buttons are always activ...

Page 94: ...indicates the rotational speed 33 KRPM for high speed or 26 KRPM for low speed Monitor Relay Programming The display shows H S T H R E S H O L D S E T T I N G X X K R P M where XXKRPM is the switch po...

Page 95: ...E A D Y U S E R E M O T E S T A R T H S With or without Soft Start mode selected the START STOP and LOW SPEED front panel push buttons are inoperative while the CYCLE NUMBER and PUMP CURRENT pushbutt...

Page 96: ...TECHNICAL INFORMATION 89 87 900 929 01 H MAINTENANCE Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 97: ...an S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALT...

Page 98: ...king Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application P...

Page 99: ...011 997 9 350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Lt...

Page 100: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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