page 8 of 80
Contents
Safety information! ............................................................. 9
Important information! ......................................................................... 9
General information ............................................................................11
Setting up and installing the equipment ............................................ 14
Ambient conditions ............................................................................ 16
Operating conditions ......................................................................... 17
Safety during operation ..................................................................... 18
Maintenance and repair..................................................................... 21
Important information: Equipment marking (ATEX) ................... 24
Technical data ................................................................... 26
General technical data valid for all pumps/pumping units ................. 26
Gas inlet temperatures ..................................................................... 27
Use and operation ............................................................ 40
Installing a pump in a vacuum system .............................................. 40
During operation ................................................................................ 44
Important notes regarding the use of gas ballast .............................. 46
Important notes concerning the operation of the
exhaust waste vapor condenser....................................................... 47
Shutdown & storage .......................................................................... 49
Accessories ...................................................................... 50
Troubleshooting ............................................................... 52
Replacing diaphragms and valves.................................. 54
Cleaning and inspecting the pump heads ........................................ 56
Replacing the diaphragm ................................................................. 60
Replacing the valves ........................................................................ 62
Replacing the overpressure safety relief device............................... 67
Replacing the fuse............................................................................ 68
Repair - Maintenance - Return - Calibration ................... 70
Warranty ............................................................................ 72