IU-ILi ________________
Vacuum/Atmospheres
FLOWMETER
PURGE
REGENERATION
GAS
LESS
'IBAN
4%
HYDROGEN
PURIFIER
K
VACUUM
CIRCULATION
INLET A
CIRCULATION
OUTLET B
N
VENT
LEGEND
� HAND VALVE
B
SOLENOID VALVE
1------
Figure 4-3. Gas Flow Diagram
4-9
BLOWER
DRI-LRB
HE-493-R3-7 /90