12
7) MAIN.SW:
OFF
8) Breaker of user side:
OFF
9) If there is any liquid nitrogen inside, it evaporates naturally.
3. Deposition Steps
3-1 Opening bell jar
1) When an ionization gauge is use. Filament: OFF
2) Main valve:
COMPLETE CLOSE
3) Three-way valve:
FORE Confirm
4) VENT. V (of Main Valve) when necessary:
Open gradually
3-2 Vacuum evacuation of bell jar
1) VENT. V (of Main Valve):
CLOSE
2) Bell jar:
Install
3) Three-way valve:
ROUGH
Rough evacuation of the inside of the bell jar, Check: 13 Pa or
lower
4) Three-way valve:
FORE
5) Main valve:
COMPLETE OPEN
6) When an ionization gauge is use. Filament: ON
