3
3. Product Specifications
Ultimate pressure
1.3 x 10
-3
Pa
(Upon no-load cleaning in vacuum chamber)
6.6 x 10
-4
Pa
(Using liquid nitrogen, upon no-load cleaning
in vacuum chamber)
Evacuation time
20 minutes or less up to the 4.0 x 10
-3
Pa
(Upon no-load cleaning in vacuum chamber)
20 minutes or less up to the 1.3 x 10
-3
Pa
(Using liquid nitrogen, upon no-load cleaning
in vacuum chamber)
Necessary power
Single-phase 100 V, 0.63 kVA
Single-phase 200 V, 1.5 kVA
External dimensions
(Main unit)
Weight(Main unit)
Width:434 mm × Depth: 422 mm × Height: 673 mm
Approx. 32kg
Finished
color
(Rack)
(Panel)
baking finish (Munsell 6Y 8/0.8)
baking finish (Munsell 6Y 8/0.8)
Refer to the specification sheet for special models.
4. Individual Unit Specifications
Unit
Model and Specifications
Quantity
1) Glass bell jar
- Dimensions: Internal diameter 150 mm ×
Height 200 mm
- Material: Hard glass
1 pc.
2) Base plate
- Dimensions:
External diameter 200 mm
- Material:
Iron and nickel coating
- Accessories:
1-point electrode
Hermetic port
Shutter
Column
2 pc.
1 pc.
1 set
4 pc.
