Ulvac UMP-40W, Instruction Manual

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6 ULVAC CRYOGENICS INCORPORATED
Component Description
Ｌｉｑｕｉｄ Ｎｉｔｒｏｇｅｎ Ｇｅｎｅｒａｔｏｒ
Ｍｏｄｅｌ：ＵＭＰ－４０Ｗ
Touchscreen(HMI)
Ｙ
ＮＣ
Ｅ Ｇ
ＥＲ
Ｍ
Ｅ
Ｓ Ｔ Ｏ Ｐ
%
MANUAL
START
AUTO
READY
RUN/
STOP
GN ON/
OFF
AUTO
SUPPLY
MANUAL
STOP
A11 ： MAIN
ALARM
DEWER LN2
0
Emergency Stop Button (EMS)
LN2 Manual
Dispense Port
Figure 4-1 Front view of UMP-40W
Front view of UMP-40W (Figure 4-1)
Emergency stop button(EMS) :Press this button to shut down the control circuit to stop as
dispensing liquid nitrogen or liquefaction. Do not use the
emergency stop button except for emergency.
Front left door :Remove two screws to open this door. Inside the door, there is a
liquid nitrogen dewar, a cold head or open this door only for
periodic inspection, maintenance and repair services.
Front right door :Remove two screws to open the front right door. Inside the door,
there are C30PMVRT and electric circuits. Open this door when
you adjust helium gas pressure.
※
Ensure that main power is disconnected before opening this
door.