Ulvac SWU10-U, Instruction Manual

Page: 28 / 39

SK00-9662-EI-103-00
21
Environmental temperature fluctuates.
Wait for the environment temperature to
stabilize. It is influenced by the
principle of the Pirani gauge.
Hot or cold gas is flowing.
Please do not be affected by the gas
temperature. It is influenced by the
principle of the Pirani gauge.
Effects of moisture and dirt.
Please do not let it affect you as much as
possible. Evaporation heat is affected by
gradual evaporation.
There is a leak in the sensor part or near
where the vacuum gauge is attached.
Sensor part leak
⇒ Replace the vacuum gauge.
Other leaks
⇒ Please stop the leaks.
Poor contact of USB cable, increase in
wire resistance, etc. Check the connection of the USB cable,
etc.
USB cable is electromagnetically induced
(due to external noise)
Change the installation location of the
USB cable, or turn off the equipment that
may be a source of noise.
● Expected pressure and measured pressure differ greatly
Cause Action
Contamination inside the sensor part.
Sensitivity deviates significantly.
Check with another vacuum gauge. If the
other vacuum gauges are fine, then the
vacuum gauge is the problem.
You are measuring the air on the nitrogen
setting.
Normal.
When measuring air in the nitrogen
setting, the gas dependence of the Pirani
gauge will indicate higher pressures.
An environment with a lot of moisture and
oil.
Install so that there is no influence as
much as possible. Evaporation heat is
affected by gradual evaporation.
The actual pressure is different. Check with another vacuum gauge.