RF Power Supply and Matching Box
4. Functions
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4-1-2. Control panel functions and explanations
1) Fluorescent display
Shows the setting values for each mode's functions.
Shows measurement values.
Shows the operating status.
2) Operation keys
ON: Outputs RF.
OFF: Stops RF. (Doubles as the RESET key.)
Left key/right key: Can select menus and input an increase or decrease in setting values.
Up key/down key: Can select menus and change the digit of setting values.
During operation the measurement value can be displayed by pushing the arrow keys.
ESC key: Can return to the previous menu.
ENT key: Can select, confirm settings, and send you to the next screen.
3) Buzzer
Short sound (approx. 100 ms): When selecting the menu, entering setting values
Long sound (approx. 1 s): When outside the setting's range, ALARM output
Figure 4-2 Control panel
ALARM
ESC
ENT
OUTPUT
RF POWER CONTROLLER
TARGET
OSC
Vdc
OP
TIME
LIFE
Vpp
ON
RESET
OFF
