Ulvac PHS-04N, Instruction Manual

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RF POWER SUPPLY and MATCHINGBOX 5. Operation methods
15
5-5. Screen 4
At Screen 4, the current setting state of basic frequency can be displayed and changed.
Figure 5- Screen 4
Table 5-4 Explanation of functions of Screen 4
Category Function
OSC FREQ
13560000 Hz: Indicates the basic frequency is 13.56 MHz.
The configurable range is 13554000 Hz to 13566000 Hz
*Output is stopped temporarily during a change.
SERIAL Normally not used.
5-6. Screen 5
At Screen 5, the equipment name, model, and serial number information are displayed.
Settings cannot be changed at the screen.
Figure 5-6 Screen 5
Table 5-5 Explanation of functions of Screen 5
Category Function
PHASE SHIFTER Displays the name of this equipment.
PHS-04N Displays the model of this equipment.
715001 Displays the serial number of this equipment.
* Serial numbers differ by unit.
OSC FREQ = 13560000 Hz
SERIAL = 9600 bps
PHASE SHIFTER
PHS-04N 715001