Ulvac PHS-04N, Instruction Manual

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RF POWER SUPPLY and MATCHINGBOX 3. Preparation
8

Equipment must be used at an altitude of 2,000 m or lower.

Ensure good airflow to the front and rear sides.

Establish a gap of 10 cm from the front side and 10 cm or more from the rear side .
When equipment will be installed in the cabinet or similar location, use panels with
air-intake holes on the front and rear sides, and set a structure for the rear side so that
heat does not accumulate inside.

When installing in a standard rack, always use a rack with a support thickness of 3 mm
or more.

The front panel has only a function to prevent falling from the rack.

Avoid installing in a location in which the floor is not flat.
3-2-3. Storage environment and transportation conditions

When this product will be transported or stored in a warehouse, the ambient
temperature must be from -25°C to 55°C, the humidity must be 80% or less, there
must be no condensation, and there must be no ingress of water, dust, etc.
3-5. Connection of cables
Connect cables while referring to "Figure 3-2 System wiring diagram". For the cables to be
used, refer to "Table 3-2 Cable list". The customer must prepare the RF power supply
system unit.
Plasma chamber
Single-phase AC 100 V
(When a AC input cable compliant with 200 V
is used, 200 V is also possible)
AC 100 V input cable
RFS-OSC
PHS-**N
(Phase shifter)
RFS-****N
(RF generator)
MBX-****N
(Matching box)
Breaker (short circuit
breaker)
External controller (PLC, etc.)
AC**-N
External control cable
RF**-N
AMC-N
RFS-****N
(RF generator)
Breaker (short circuit breaker)
MBX-****N
(Matching box)
External controller (PLC, etc.)
AC**-N
External control cable
RF**-N
AMC-N
Up to 4 or 8 channels can be connected
Plasma chamber