Ulvac GP-2001G, Instruction Manual, Page: 7 / 36

－ V －
Table of Contents
PRIOR TO USE .............................................................................................................................................................................
Ⅰ
SAFETY SYMBOLS .....................................................................................................................................................................
Ⅰ
SAFETY CAUTIONS ...................................................................................................................................................................
Ⅱ
REVISION HISTORY ..................................................................................................................................................................
Ⅳ
1. GENERAL DESCRIPTION ............................................................................................................................................... 1
1.1. S
PECIFICATIONS
.............................................................................................................................................................. 1
1.2. S
TANDARD ACCESSORIES
............................................................................................................................................... 1
1.3. O
PTION
............................................................................................................................................................................. 2
1.3.1. Sensor head ............................................................................................................................................................... 2
1.3.2. Measuring unit ......................................................................................................................................................... 2
1.3.3. Sensor head cable .................................................................................................................................................... 2
1.3.4. Supply cable 3m
（
only GP-2001G
）
.................................................................................................................. 2
1.3.5. Others .......................................................................................................................................................................... 2
1.4. D
ESCRIPTION OF
C
OMPONENTS
................................................................................................................................... 3
1.4.1. Front panel ................................................................................................................................................................ 3
1.4.2. Rear Panel ................................................................................................................................................................. 4
2. INSTALLING THE PIRANI VACUUM GAUGE ...................................................................................................... 5
2.1. P
RELIMINARY
O
PERATION
............................................................................................................................................ 5
2.2. I
NSTALLATION
................................................................................................................................................................. 5
2.2.1. Installing the controller .......................................................................................................................................... 5
2.2.2. Installing the sensor head ..................................................................................................................................... 6
2.2.3. Installing the supply cable .................................................................................................................................... 7
2.2.4. Electrical connection ................................................................................................................................................ 7
2.2.5. A sensor head installation method to GP-H ................................................................................................... 9
3. OPERATING PROCEDURE ........................................................................................................................................... 10
3.1. C
AUTIONS IN
H
ANDLING
............................................................................................................................................. 10
4. OPERATING PROCEDURE ........................................................................................................................................... 11
4.1. S
UMMARY OF THE OPERATION METHOD
.................................................................................................................. 11
4.2. S
ELECTING THE
R
ECORDER
O
UTPUT
....................................................................................................................... 12
4.3. S
ELECTING THE
U
NIT OF
P
RESSURE
........................................................................................................................ 12
4.4. D
ISPLAY AND
C
HANGE OF
S
ETPOINT
C
OMPARISON
V
ALUE
................................................................................ 12
4.5. A
DJUSTING THE
R
ECORDER
O
UTPUT
....................................................................................................................... 13
4.6. R
ECORDER OUTPUT
...................................................................................................................................................... 14
4.7. S
ETPOINT
O
UTPUT
....................................................................................................................................................... 16
4.8. Z
ERO
R
ESETTING
F
UNCTION
...................................................................................................................................... 16
5. APPENDIX ............................................................................................................................................................................ 17
5.1. P
RINCIPLES OF
O
PERATION
........................................................................................................................................ 17
5.2. T
YPES OF
G
AS
M
EASURED AND
I
NDICATION
.......................................................................................................... 18
5.3. C
HANGE OF
I
NDICATION WITH
A
MBIENT
T
EMPERATURE
.................................................................................... 20
6. TROUBLESHOOTING ...................................................................................................................................................... 21
7. WARRANTY.......................................................................................................................................................................... 23
8. CHINA ROHS DECLARATION .................................................................................................................................... 24
9. CERTIFICATE OF DECONTAMINATION ............................................................................................................... 25
10. RELATED DRAWINGS ............................................................................................................................................... 26