Ulvac GN-15i, Instruction Manual, Page: 12 / 32

6 ULVAC CRYOGENICS INCORPORATED
3. Component Descriptions
3.1 External Dimensions and Component Description
①
Air inlet
⑨
Compressor alarm light
②
Maintenance port
⑩
Alarm light / Reset button
③
Ventilation fan
⑪
Run/Stop button
④
Cable entrance
⑫
Circuit breaker (inside)
⑤
Nitrogen gas discharge port
⑬
Pressure sensor (inside)
⑥
Spare entrance port
⑭
Pressure regulator (inside)
⑦
Pressure alarm light
⑮
Nitrogen gas outlet meter (inside)
⑧
Nitrogen gas flow meter
⑯
Caster
Clear the spaces below for maintenance works.
Front: 600mm or more
Sides: 600mm or more
Back: 200mm or more
Unit: mm
Operation Panel
56
4
527
12
32
600
85
600
620
95
0
65
480
480
20
155 55
メンテナンススペースについて
下記スペースを確保してください
正面： 600mm 以上
左右： 600mm 以上
背面： 200mm 以上
操作部
11
10
２
７
９
８
３
５
６
４
16
１
操作部
14
15
13
12