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10.4.
Removing the Sensor Unit and Sensor Head
Turn off power.
Turn off the power to the vacuum gauge before conducting
maintenance. The sensor head anode is energized with a power of
about 2.6 kV D.C., which may cause electric shock.
Beware of magnetic field
The sensor head has a flux density of about 0.1 T at the center of the
inner diameter. If brought close to a metal object, it will be attracted
with strong force and may catch your finger or other.
10.4.1.
Removing Screws
Remove the 3 M3 screws marked with arrows in Fig. 10-1 using a Philips screwdriver
for M3 screws.
Fig. 10-1 Bottom view of sensor unit
10.4.2.
Removing the Sensor Head
Remove the sensor head from the sensor unit
slowly.
Here, be careful not to bend the anode pin
marked with arrow in Fig. 10-2.
Fig. 10-2 Sensor head and sensor unit
A
Summary of Contents for G-Tran Series
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