Ulvac EMP-20W, Instruction Manual

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14 ULVAC CRYOGENICS INCORPORATED
5. Utilities
5.1 Power source (for EMP-20W)
Voltage : 200 VAC , 3-phase
Power capacity : 30 A or above
Power consumption : 3.3/4.1 kW ( 50/60 Hz )
Connection : Round type crimping terminal for M5
Use Class-D earthing for safety.
CAUTION
5.2 Cooling water (for EMP-20W)
Flow rate : 180 – 330L/hour (recommended: 270L/h)
Pressure : 0.04 – 0.17 MPa (recommended: 0.1MPa)
Temperature : 10 – 30 °C ( recommended: 20 °C)
Water quality : Tap water equivalent
* Check the water quality on a regular basis.
The flow rate of cooling water should be within the following allowable range.
When the flow rate or pressure is too low, it may result in abnormal suspension,
failure, or damaging cooling water pipes due to the temperature rise.
CAUTION