10
6-3 Periodic Inspection
Conduct periodic inspections of consumable parts in every 4,500 hours after started using and replace
parts according to "Guideline of Parts Replacement". Replacement method [6-4. refer to replacement
of consumable part]. In case there is no repair engineer, Ulvac Service Section shall be happy to
replace the parts.
Table 6 -1 Consumable Parts List
Part name
Quantity
Material
Reference life
41D(K) 81S(K)
Diaphragm
2
2
Synthetic rubber
（
EPDM
）
PTFE affixed
9,000hr
Valve A
3
2
PTFE
9,000hr
Valve B
1
2
PTFE
9,000hr
Valve holder A
2
2
EPDM
9,000hr
Valve holder B
1
2
SUS
9,000hr
Inlet / exhaust filter
2
3
Urethane cellular porous
medium
9,000hr
O ring (S-28)
6
6
Synthetic rubber (FPM)
9,000hr
O ring (P-10A)
2
2
Synthetic rubber (FPM)
9,000hr
Bearing
1 set
1 set
―――
15,000hr
These lives may differ according to the working conditions.
Lives may be extended by operating the pump with smaller load by observing "4-1 Caution in
Operation".
Operating the pump with smaller load means the operation at ultimate pressure (inlet port closed).
Bearings shall be replaced by Ulvac Service Section.
