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8. Maintenance, Inspection, and Repair
8.1. Cautions for Maintenance, Inspection, and Repair
Cut the main power supply before doing the maintenance work.
When requesting the manufacturer’s service division to dismantle and repair the pump,
always note the gas, which the pump has been used with on the Usage Check Sheet. Note
that if it has been used to discharge toxic gas for any reason it will be contaminated. Please
be aware that use with some gases will preclude dismantling and repair.
Cut the main power supply before doing the maintenance work.
The fine clearances used in this pump require skill in its assembly. If a repair technician is
unavailable, replacement of all consumables should be left to the manufacturer’s service division.
8.2 Maintenance
The following checks are required at least once every three days during operation.
If a problem is found, take the measures described in 7.5 TROUBLESHOOTING.
(1) Check for abnormal noises.
(2) Check for abnormal heating of the pump.
(3) Check that gas is discharged normally.
(4) Dust is absorbed with the vacuum cleaner.
Table2. List of Consumable parts
Description
Qty
Material
Life expectancy
Diaphragm
2 pcs
HNBR
6,000
～
8,000 hrs
Suction/exhaust valve
4 pcs
SUS
6,000
～
8,000 hrs
Pump head cover gasket
2 pcs
NBR
(Option EPDM)
6,000
～
8,000 hrs
Air filter
2 pcs
Urethane foam
6,000
～
8,000 hrs
Bearing
1 set
―
Approx. 15,000 hrs
The life expectancy of these parts vary considerably depending on the operating conditions.
Replacement of the bearing will be undertaken by ULVAC KIKO, Inc. of Sales Office.
See
【
Sales, service agency, and the where to make contact
】
of the end of instruction manual.
!
Danger
!
Note
