Ulvac CRYO-U Series, Instruction Manual

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CRYO-U
®
Cryopump Instruction Manual
5. OPERATION
5.1 Prior to Startup ························································· 5-1
5.2 Rough Pumping ························································ 5-1
5.3 Pressure Buildup Test ················································ 5-2
5.4 Startup and Cooldown ················································ 5-2
5.5 Normal Operation ····················································· 5-3
5.6 Crossover ······························································· 5-4
5.7 Shutdown Procedures ················································ 5-6
5.8 Handling of Hazardous Materials ·································· 5-6
＊
The regeneration procedures described in this section is referring to an exhaust system
shown in Figure 4-1 as an example.
5.1 Prior to Startup
Before starting operation, please check the followings:
１．
The flexible hoses and cables are properly connected.
２．
The gauges are mounted on each intended ports
.
３．
The main valve
（
V1
）
is closed.
４．
The roughing valves
（
RV1, RV2
）
are closed.
５．
The helium gas pressure gauge on the compressor unit shows the specified value.
It is recommended to carry out daily check and keep an operating log to notice the first
sign of a trouble as fast as possible. This will help you to get prompt technical assistance
from us. The recommended operating log is attached to Appendix A.
5.2 Rough Pumping
In order to start the operation of the cryopump, it is necessary to rough pump the
cryopump to approximately 40Pa beforehand. If the pressure of 40Pa or less
required, it is recommended to add a fore-line trap in the rough pumping system
or to use a dray pump instead of a oil-sealed rotary pump.
１．
Start up the roughing pump.
２．
Open the roughing valve
（
RV1
）
and then rough pump the cryopump.
ULVAC CRYOGENICS INCORPORATED 5-1