Ulvac CRYO-U Series, Instruction Manual

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CRYO-U
®
Cryopump Instruction Manual
2. INSPECTION
2.1 Shipping List ···························································· 2-1
2.2 First Inspection of Cryopump ······································· 2-2
2.1 Shipping List
When the cryopump system is delivered, make sure that there is no damage or
shortage of delivered items by checking the external view of the package and the
shipping list attached.
Please see Table 2-1 if you purchased a CRYO-U
®
cryopump system, and Table 2-2 for
CRYO-U
®
cryopump assembly alone.
Please read the enclosed cover letter for the details.
Table 2-1. Shipping List for Cryopump System
Item Quantity
CRYO-U
®
cryopump 1
Compressor unit 1
Accessory of compressor unit
(*1)
1
Optional devices for control system
(*2)
1
Instruction manual
・
This instruction manual
・
Instruction manual of optional devices for cryopump
(*3)
・ Instruction manual of compressor unit
・
Instruction manual of optional devices for control system
1 each
(*1)
Input Power Cable, Refrigerator Power Cable, Remote Connector, Spanner kit, Flexible
Hose, etc. Contents of accessories depend on the model of your compressor unit. Read the
compressor unit instruction manual for the details
(*2)
CRYO-METER, Heater Controller, Diode Indicator, or the cables etc. Read the cover letter for
the details.
(*3)
MBS-C CRYO-METER, RBH Band Heater, Regeneration Gas Purge PR Unit, etc.
Table 2-2. Shipping List for Cryopump assembly
Item Quantity
CRYO-U
®
cryopump 1
Instruction manual
・ This instruction manual
・
Instruction manual of optional devices for cryopump
(*3)
1 each
(*3)
MBS-C CRYO-METER, RBH Band Heater, Regeneration Gas Purge PR Unit, etc.
ULVAC CRYOGENICS INCORPORATED 2-1