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2472 DI HEATER OPERATION / MAINTENANCE MANUAL
PAGE 3
1
INTRODUCTION
2472 DI WATER HEATER
Proven advantages associated with using high purity DI water at elevated
temperature include: faster rinse time to purity, elimination of substrate
streaking, less water consumption for rinsing and increased product
throughput.
This system employs a simple, compact design, which minimizes the use
of cleanroom floor space. The heater systems temperature sensors,
controls and heaters are constructed for tight control of the process
temperature even in the extent of large process flow changes. DI water
contacts only high purity fluoropolymer materials (PVDF, PFA, and
PTFE). The modular system design facilitates the addition or
replacement of system components as the need arises. Redundant,
built-in safety features and heater diagnostics provide valuable user
protection and performance feedback.
With proper care and maintenance, the Model 2472 DI Water Heater
System has proven itself reliable with many years of installed heater run
time, resulting in substantial cost saving through increased productivity.
This equipment complies with the semiconductor manufacturing industry
requirements of SEMI S2-0200:
Figure 1-1
: “SEMI S2-0200”
Conformity of the equipment with the above guidelines is attested by the
TUV certification mark.
