Thyracont VSH82, Operating Instructions Manual, Page: 49 / 52

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vsh82-de-110318
6 Technical Data
Measurement Principle
Heat conduction Pirani / Hot Cathode Bayard Alpert
Measuring Range
1000 - 1,0x10-9 mbar (750 - 1,0x10-9 Torr)
Max. Overload
4 bar abs.
Accuracy 1000 - 20mbar: ca. 30 % f.r. (from reading)
20 - 0,001mbar: 10 % f.r.
< 0,001mbar: 15 % f.r.
Materials with vacuum
contact stainl. steel 1.4301, tungsten, nickel, glass, ceramic,
iridium
Filaments Bayard Alpert
yttria coated iridium
Emission Current
9 µA, 100 µA, 1.0 mA
Degas Method
ohmic heating of the anode
Scanning Rate
120 ms