Rev 24 Oct 2018
Page 11
Chapter 3
Operation
3.3
Piezo Actuators
Piezo actuators are used to give nanometric positioning of the top platform over a
range of 20 microns (40 µm or 100 µm if external piezo actuators are used). They can
also modulate the position of the platform at high frequency.
On a piezo-actuated NanoMax, position feedback may be incorporated on the linear
axes to enhance the repeatability and linearity of piezo motion.
The piezo-actuated NanoMax should be used together with one of the Thorlabs
piezoelectric controllers – see the handbook for the relevant piezoelectric controller.
The NanoMax monitors the ambient temperature using thermistors and applies small
movements to the stage to compensate for the expansion and contraction of metals
within the stage. Note that this compensation is active only when the associated piezo
controller is set to ‘closed loop’ (feedback on) mode – see the
relevant piezo controller
handbook
for more details on the operation of piezo actuators.
Warning
The piezo actuators in this product use high voltages and up to 75V may be
present at the SMC connectors. This is hazardous and can cause serious
injury. Appropriate care should be taken when using this device.
Persons using the device must understand the hazards associated with using
high voltages and the steps necessary to avoid risk of electrical shock.
Caution
Under normal operation, the piezo mechanism uses contact with the
micrometer drives in order to move the top platform. If for any reason the stage
is operated with the micrometer drives removed, blanking plugs must be fitted
before the pizo actuators can function.
