8 kHz Galvo-Resonant Scanner and Controller
Chapter 7: Specifications
Page 24
TTN118194-D02
7.3.
Galvo Mirror Specifications
Specification
Value
Mirror
Substrate
Silicon
Coating
Protected Silver
Coating Reflectivity
350 - 450 nm
>70%
450 - 550 nm
>90%
550 - 650 nm
>92.5%
650 - 1080 nm
>95%
1080 - 7000 nm
>97%
Surface Quality
60-40 Scratch-Dig
Front Surface Flatness (@ 633 nm)
<λ/4
Clear Aperture
Within 0.020
" of any edge or rail
Galvo Motor and Position Sensor
Linearity
Typical: 99.9%
Min: 99.5%
Scale Drift
50 ppm/°C (Max)
Zero Drift
15 µrad/°C (Max)
Repeatability
5
8 µrad
Average Current
2.4 A
Peak Current
8.0 A
Scan Angle
30º Optical Peak-to-Peak
Input Scale Factor
1.33 V per Mechanical Degree
Output Scale Factor
0.533 V per Mechanical Degree
Small Angle Step Response
260 μs
Maximum Large Step Angle
1.6 ms (Sine)
2.0 ms (Sawtooth)
5
The system noise is less than 16 bits over a full voltage range (-10 to 10 V).
