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5.
OPERATION
OPERATION
Following start-up, proceed as follows for operation:
Instruction
Button / Remarks
Display / Remarks / State
Adjust the process gas
Adjust the fine metering valve
for the process gas in such a
way as to maintain a pressure of
approx. 35 mbar, within 1000
mbar ambient pressure, inside
the chamber during the process
Pressure indicator
Monitor the temperature in-
side the chamber
Controller temperature display
The displayed temperature
values only refer to the
temperature of the trays
Observe the OPERAT-
ING GUIDELINES I
Proceed according to the instructions in the SHUTDOWN section at the end of the process.
Summary of Contents for VT 6060 M-BL
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