
FC/BCD-2800 Facility and Installation Guide
Section 3: Unpacking and Installation
0101-8603-0, Rev. F
3-5
FC/BCD-2800 F & I Guide
3.3
Temescal Installation Responsibilities
3.3.1 Helium
Circuit
Recharging
During shipment, all cryopump lines are charged with Helium at 250 psig (17.24 torr) to
protect the integrity of the system, particularly the cryopump, from contamination.
However, if the system must be air-shipped during any part of the transit, the Helium
pressure must be reduced to a maximum of 15 psig (1.03 torr) prior to shipment, in
accordance with U. S. Federal Aviation Agency regulations. During the installation of any
such Temescal system, the Temescal service representative will be responsible for
recharging and decontaminating the Helium lines and the cryopumps. Thereafter, the
customer will be responsible for maintaining the integrity of the system.
In such cases, the cryopump must be recharged with 99.999% pure Helium to 250 psig.
Such customers should therefore have on hand at least one standard bottle of 99.999%
pure Helium. The Temescal service representative will have the required equipment and
tools, as specified in Table 2 of CTI Cryogenics’
On-Board
®
Cryopump Installation and
Maintenance Instructions
(Helix document 8040491, Revision 102, dated 2/3/04). Helium
recharging and decontamination procedures must be performed in strict accordance with
the instructions in Chapter 4 of that manual.
3.3.2
Making the Remaining Service Connections
An authorized Temescal field service technician must make the connections specified
below. For approximate line-routing layouts, see Figures 3-8 through 3-10.
DANGER: HIGH VOLTAGE
Before connecting power lines to any system components, service personnel
should ensure that all switches and controls are in the OFF position.
Electrical Power :
Connections between the PDB and
- Vacuum cubicle
- Operator station
- Mechanical pump and blower, if any
- Cryopump compressor
Control/Data Cables:
Operator station to vacuum cubicle
Operator station to remote monitoring system (optional)
High Voltage Cables:
HV cable from power module (in operator station) to vacuum cubicle
Copper Grounding Strips:
As required for low-impedance grounding
3.3.3
Energizing the Electrical Circuits
The customer is responsible for routing all cables and lines per applicable codes.
However, all electrical connections between the PDB and the vacuum cubicle, the
operator station, the mechanical pump(s), and the power supplies shall be made by or
under the supervision of the Temescal service representative. Once all connections are