FC/BCD-2800 Facility and Installation Guide
Section 1: Introduction and Site Prep. Checklist
0101-8603-0, Rev. F
1-3
FC/BCD-2800 F & I Guide
(FC/BCD-2800)
SITE PREPARATION CHECKLIST
The Customer is responsible for providing properly rated power, water, air, and gases
services to their appropriate termination points at the System prior to installation.
Please
read this Guide for more specific details.
As each requirement is completed, place a check mark in the appropriate check box below. When
ALL requirements have been completed, sign and date this page, then fax this checklist back to
Temescal (925 449-4096), Attn: Customer Support Coordinator.
Environment
: For additional information, see section 2.1.
Ambient Air Temperature
55ºF to 90ºF (12ºC to 32ºC),
Relative Humidity
50% maximum
Air conditioning
Capable of 5 kW cooling
Water (conditioned):
For additional information, see section 2.2.
Cold Water Supply #1 (Vacuum Cubicle)
Max. inlet pressure
100 psig (6.89 bar)
Min. delta pressure
50 psig (3.45 bar)
Inlet temperature
50º–70º F (10º–21º C)
Filtered to 50 microns
Flow Rate Requirements:
Chamber walls and doors
5 gpm (18.9 L/min.)
Each e-beam source
2.75 to 5.0 gpm (11.4 to 18.9 L/min.)
Each crystal monitor
0.5 gpm (1.9 L/min.)
Cold Water
Supply #2 (Cryopump Compressor)
Min./max. inlet pressure
30/100 psig (2.07/6.89 bar)
Inlet temperature
10º–30º C
Min. flow rate
CTI 8200 cryopump
1.50 gpm (5.7 L/min.)
CTI 9600 cryopump
2.75 gpm (10.4 L/min.)
Cold Water
Supply #3
For Edwards Model iGX100 and iGX3/100 pumps:
Min./max. inlet pressure
40/100 psig (2.77/6.89 bar)
Inlet temperature
10º–30º C
Min. flow rate requirements
Edwards Model iGX100
0.3 gpm (1.1 L/min.)
Edwards Model iGX3/100
0.6 gpm (2.2 L/min.)
For water requirements for mech. pumps other than those supplied
by Temescal, consult the manufacturer of the pump in question.
Optional Hot Water
Max. inlet pressure
90 psig (6.21 bar)
Min. delta pressure
50 psig (3.45 bar)
Flow rate
5 gpm (18.9 L/min.)
Approximate temperature
140° F (60° C)
Filtered to 50 microns
