SUSS CIC1200, User Manual

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OPERATING PROCEDURES
16
OP CIC1200E Rev4.0 06-09 Chapter 4
4
4.5. Operating Modes
The three operating modes of the CIC are: CP, CH1
and CH2.
Note:
CP must be set also for the mask aligner mode
„Constant Dose“.
4.5.1. Operating Mode CP
CP stands for Constant Power. The exposure lamp
is run with constant electric power: One can set the
power of the exposure lamp as described in the Sec-
tion 4.6.2 of the present manual.
Note:
All calibration is done in CP-Mode!
4.5.2. Operating Mode CH1
CH1 stands for Constant Intensity Channel 1. The
exposure lamp is run in constant light intensity mode
controlled by light sensor 1 (spectral range for exam-
ple 365 nm).
4.5.3. Operating Mode CH2
CH2 stands for Constant Intensity C h annel 2. The
exposure lamp is run in constant intensity mode con-
trolled by light sensor 2 (spectral range e.g. 405 nm).
Choose the appropriate operating mode by activat-
ing one of the keys labeled CP, CH1 or CH2. The
key in question will be illuminated.