SUSS MicroTec Worldwide
ASIA
SUSS MicroTec KK (Japan)
GITC 1-18-2, Hakusan, Midori-ku
Yokohama-shi, Kanagawa, Japan 226-0006
Phone (+81)-45-931-5600
Fax (+81)-45-931-5601
SUSS MicroTec (Shanghai) Co.,Ltd.
580 Nanjing West Rd
Nanzheng Building Room 3703
200041 Shanghai PRC
Phone (+86) 21-52340432
Fax (+86) 21-52340430
SUSS MicroTec (Taiwan) Co., Ltd.
8F-11, No. 81, Shui-Lee Road
Hsin-Chu l 300 l Taiwan
Phone (+886)-(3)-5169098
Fax (+886)-(3)-5169262
SUSS MicroTec (Korea) Co., LTD
41F Gangnam Finance Center,
737 Yeoksam-dong, Gangnam-gu
Seoul
135-984 Korea
Phone (+82) (0)2 2008 4656
Fax (+82) (0)2 2008 4555
SUSS MicroTec (Singapore)
The Comtech, 60, Alexandra Terrace, #02-21
118502 Singapore
Singapore
Phone (+65) 627 173 53
Fax (+65) 627 182 76
www.suss.com
EUROPE
SUSS MicroTec SAS
320, Avenue Berthelot
France 69371 Lyon cedex 08
Phone (+49) 89 32007 0
Fax (+49) 89 32007 162
SUSS MicroTec Lithography GmbH
Schleissheimer Strasse 90
D-85748 Garching/München l Germany
Phone (+49)-(0) 89/3 20 07-0
Fax (+49)-(0) 89/3 20 07-162
NORTH AMERICA
SUSS MicroTec Inc.
228 Suss Drive
Waterbury Center, VT 05677 l USA
Phone (+1) (802) 244-5181
Fax (+1) (802) 244-5103
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Summary of Contents for CIC1200
Page 1: ...USER MANUAL Constant Intensity Controller CIC1200 Rev4 0 06 09 www suss com...
Page 2: ......
Page 4: ...DISCLAIMER AND PUBLISHING DETAILS II DISCLAIMER i...
Page 16: ...PROGRAM PARAMETERS 10 OP CIC1200E Rev4 0 06 09 Chapter 3 3...
Page 36: ...OPERATING PROCEDURES 28 OP CIC1200E Rev4 0 06 09 Chapter 4 4...
Page 40: ...MAINTENANCE AND SERVICE 32 OP CIC1200E Rev4 0 06 09 Chapter 5 5...
Page 41: ......