SUSS CIC1200, User Manual

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WARNINGS AND SAFETY HAZARDS
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OP CIC1200E Rev4.0 06-09 Chapter 1
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1.6. Additional Warnings and
Safety Precautions
These additional warnings and safety precautions
are related to hazards originated by the host ma-
chine (e.g. mask aligner). The CIC is intended to be
incorporated into. They shall be regarded as a short
form and general information only.
Warning!
For details refer to the manuals of the
specific host machine.
Fail to comply with safety precautions
stated in those manual may result in se-
vere injury as well as substantial dam-
age to property!
1.6.1. Other Electrical Hazards
Protection against electrical hazards is provided by
closed, grounded cabinets for the electrical devices.
The CIC, the ignition unit inside the Lamp House and
the lamp house shall only be serviced by qualified
SUSS technicians.
User related Type 3 or Type 4 tasks may be involved
(referring to SEMI S22).
The voltages and currents required to run a high
pressure lamp are hazardous. The ignition voltage
generated in the ignition unit of the lamp house rises
up to 20-30KV and the open circuit potential can
range to some 100V.
When performing any maintenance on the UV-lamp
or lamp house, always make sure that the power line
is disconnected and locked-off at the energy isola-
tion device.
The voltage applies to the lamp must comply with
the lamp manufacturers recommendations, other-
wise an explosion may occur. Also correct lamp ori-
entation is crucial (see lamp data sheets and SUSS
machine manuals for proper lamp orientation).
Warning!
The ignition unit is a complex electrical
component producing high voltage
pulses for lamp ignition. Repair must
be done by SUSS trained experts only.
Using unapproved parts can result in
fire or electrical shock.
Never open covers of the CIC, the igni-
tion unit or the lamp house while the
power line is connected.
Danger!
High voltage! The lamp operates
(starts) under high voltage. Voltage is
still present to the CIC when the host
machine (e.g. mask aligner) is switched
off, but in „stand by“.
All power to the systems must be com-
pletely disconnected before servicing
CIC or the lamp house.
1.6.2. Hazards Caused by High
Pressure Lamps
Special precautions must be taken when working
with these high-pressure mercury lamp lamps.
1.6.2.1. Safe Handling of the UV Lamp
The UV lamp has a limited life time and is sensitive
to rough handling. Therefore it is seen as a consum-
able.
Lamp exchange can be done by qualified and
trained users, when working at a fully de-energized
„electrical cold“ equipment.
Due to the mercury content, used lamps must be re-
garded as hazardous waste and shall be disposed
off accordingly (following local rules and law for Hg
waste).
Refer to the specific lamp data sheet and safety in-
structions (a sample is attached at the end of this
manual).
Lamps may fail because of improper cooling, im-
proper settings of the power supply, usage outside
the manufacturer’s guidelines, temperature shocks
and others.
The CIC power supply is equipped with an operating
hour meter to control the lamp lifetime. Lamp duty
overrun will cause not only degradation of lamp per-