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BE_55+56-2U_1212.docx
9
Operating Manual
of the BM and BE series
3. Description
Flow chart of gas supply with a pressure control panel
Legend
Process gas valve with inlet filter
Waste gas or purge gas valve
Pressure regulator - single-stage
Pressure regulator - two-stage
Inlet pressure gauge
Outlet pressure gauge
Relief valve
Pigtail
Gas cylinder connection
Valve port – closed
Switching mechanism
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