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Doc. no.XL*****-OMI0011-E

PRODUCT NAME

High Vacuum L Type Valve

MODEL/ Series

XLD Series

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Summary of Contents for XLD Series

Page 1: ...Doc no XL OMI0011 E PRODUCT NAME High Vacuum L Type Valve MODEL Series XLD Series...

Page 2: ...autions 1 4 Precautions on Design Selection Mounting Piping Wiring Maintenance 2 Product Specific Precautions 2 6 Maintenance parts 3 Specifications 8 4 Construction 10 5 Operation 11 6 Dimensions 12...

Page 3: ...e when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The assembly oper...

Page 4: ...a replacement product or necessary parts will be provided This limited warranty applies only to our product independently and not to any other damage incurred due to the failure of the product 3 Prior...

Page 5: ...olenoid valve 2 Keep the pilot pressure within the specified range 3 Operate within the specified operating pressure range 4 Operate within the specified operating temperature range 5 Please note when...

Page 6: ...d cleaned and re assembled by an operator who has sufficient knowledge and experience e g a specialist 1 When removing deposits from the valve take care not to damage any part of it 2 Replace the bonn...

Page 7: ...tial pumping valve seal Exterior seal valve seal Description Constructions No Material Valve size 25 40 50 Exterior seal 3 Standard AS568 030V AS568 035V AS568 039V Specific AS568 030 AS568 035 AS568...

Page 8: ...ol XN1 XP1 XQ1 XR1 XR2 XR3 XS1 XT1 XU1 Note1 Due to the different materials used changing only the seal may prove inadequate Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co Ltd Kalrez...

Page 9: ...s permeation Flange type KF NW KF NW K DN Main material Body aluminum alloy Bellows SUS316L Main part SUS304 and FKM standard sealing material Note 2 Surface treatment for body Outside hard anodized I...

Page 10: ...nominal values Note 2 Heaters are not available for the size 16 models The heaters are PTC thermistor type design These thermistors self regulate their temperature by switching the resistance at cert...

Page 11: ...ed 4 5 6 9 10 XLD 40 XLD 50 XLD 160 S valve seal O ring 4 6 9 10 XLD 63 XLD 80 XLD 100 S valve seal O ring Auto switch option Bonnet assembly maintenance part Pilot port S For initial pumping valve Pi...

Page 12: ...e adjustment nut is fixed after adjusting the initial flow tighten the adjustment nut set screw to the tightening torque shown in the table below When loosening the set screw loosen until it stops gen...

Page 13: ...XLD 40 65 170 66 2 11 55 41 63 20 15 XLD 50 70 183 79 2 11 75 52 68 20 17 5 XLD 63 88 217 100 3 11 87 95 70 72 20 20 XLD 80 90 256 117 3 11 114 110 83 98 20 26 5 XLD 100 108 321 154 3 11 134 130 102...

Page 14: ...of any damage which is led by the product failure is not taken by us Result of durability test with the circuit shown on the right Internal external leakage and operation were checked by opening and c...

Page 15: ...reafter Do not apply excessive force or impact This may damage the product as well as decrease its performance and life expectancy The cylinder portion of this product cannot be disassembled When the...

Page 16: ...l pumping valve seal O ring is removed from 25 40 50 and 160 Step 3 Step 4 Remove the O ring from the groove for discharging gas using a tool plastic whose height is the same as the groove for dischar...

Page 17: ...he groove in numerical order press diagonally to fit the O ring into the groove Take care not to twist the O ring Use dust free gloves Step 4 Step 5 Wipe off the dust of the S valve and around it Remo...

Page 18: ...ssemble the body and the bonnet assembly When tightening bolt b tighten manually until the O ring is compressed then perform extra tightening in diagonal order For models with heater tighten bolt a to...

Page 19: ...hiyoda ku Tokyo 101 0021 JAPAN Tel 81 3 5207 8249 Fax 81 3 5298 5362 URL http www smcworld com Note Specifications are subject to change without prior notice and any obligation on the part of the manu...

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