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3. Specifications
See the figure on the right for the relation
between the numbers of revolution of adjustment
nut (pitch 1mm) and conductance of the initial
exhausting valve.
(The conductance is just a reference.)
Model
XLD-25
XLD-40
XLD-50
XLD-63
XLD-80
XLD-100
XLD-160
Flange (valve) size
25
40
50
63
80
100
160
Actuating type
Normally closed
Fluid
Vacuum of inert gas
Operating temperature
o
C
5 to 60 (5 to 150 for high temperature type)
Operating pressure Pa(abs)
Atmospheric pressure to 1 x 10
-6
Conductance l/s
Note 1)
Main pumping
14
45
80
160
200
300
800
Initial pumping
0.5 to 3
2 to 8
2.5 to 11
4 to 18
4 to 18
6.5 to31.5 6.5 to 31.5
Leakage
Pa
・
m
3
/s
Internal
1.3 x 10
-10
for the standard material (FKM)
at ambient temperatures , excluding gas permeation
External
1.3 x 10
-11
for the standard material (FKM)
at ambient temperatures , excluding gas permeation
Flange type
KF (NW)
KF (NW) , K (DN)
Main material
Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM
(standard sealing material)
Note 2)
Surface treatment for body
Outside: hard anodized Inside: basis material
Actuation pressure
MPa(G)
0.4 to 0.7
Air consumption
cm
3
for 0.5MPa
Note 3)
Main pumping
46
200
360
660
1350
3000
5150
Initial pumping
3.5
12
15.5
30
42
54
54
Port size
M5
Rc 1/8
Rc 1/4
Weight
kg
0.5
1.2
1.8
3.4
5.6
11.5
20
Note1) Main pumping conductance is “molecular flow” measured with an elbow pipe which has the same
dimension as each applicable flange.
Initial pumping conductance is the value for "viscous flow".
Note2) A seal sliding part for vacuum use vacuum grease (Y-VAC2).
Note3) For one cycle of cylinder.
0
2
4
6
8
10
12
14
16
18
20
22
24
26
28
30
32
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0
Adjustment nut rotations n
Ini
ti
al
e
xha
us
t
va
lv
e
co
n
d
u
nct
an
ce
l/s
(
V
is
co
u
s
fl
o
w
)
Sh
o
w
s
fl
o
w
r
a
te
w
h
e
n
Δ
P
=
0
.1
M
P
a
XLD-25
XLD-40
XLD-50
XLD-63
XLD-80
XLD-100
XLD-160
Initial pumping conductance
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XL*****-OMI0011-E