
Linearity
Linearity,
, Hyteresis
Hyteresis
0
0
2
25
5
5
50
0
7
75
5
–1
–1
–0.6
–0.6
–0.8
–0.8
–0.4
–0.4
–0.2
–0.2
0.6
0.6
0.4
0.4
0.2
0.2
0
0
0.8
0.8
1
1
100
100
O
O
u
u
t
t
p
p
u
u
t
t
d
d
e
e
v
v
i
i
a
a
t
t
i
i
o
o
n
n
f
f
a
a
c
c
t
t
o
o
r
r
(
(
%
%
F
F
. .
S
S
. .
)
)
Input signal (%F.S.)
Input signal (%F.S.)
Repeatability
Repeatability
1
1
2
2
3
4
3
4
–1
–1
–0.5
–0.5
0.5
0.5
0
0
1
1
5
5
O
O
u
u
t
t
p
p
u
u
t
t
d
d
e
e
v
v
i
i
a
a
t
t
i
i
o
o
n
n
f
f
a
a
c
c
t
t
o
o
r
r
(
(
%
%
F
F
. .
S
S
. .
)
)
Count
Count
Pressure Characteristics
Pressure Characteristics
0
0..1
15
5
0
0..1
16
6
0
0..1
17
7
0
0..1
18
8
0
0..1
19
9
–1
–1
–0.5
–0.5
0.5
0.5
0
0
1
1
0.20
0.20
O
O
u
u
t
t
p
p
u
u
t
t
d
d
e
e
v
v
i
i
a
a
t
t
i
i
o
o
n
n
f
f
a
a
c
c
t
t
o
o
r
r
(
(
%
%
F
F
. .
S
S
. .
)
)
Supply pressure (MPa)
Supply pressure (MPa)
Flow Characteristics
Flow Characteristics
0
0
1
1
1
1..5
5
0
0..5
5
2
2
2
2..5
5
3
3
3
3..5
5
0
0
20
20
40
40
100
100
80
80
60
60
120
120
4
4
S
S
e
e
t
t
p
p
r
r
e
e
s
s
s
s
u
u
r
r
e
e
(
(
k
k
P
P
a
a
)
)
Flow rate (L/min (ANR))
Flow rate (L/min (ANR))
20kPa
20kPa
40kPa
40kPa
60kPa
60kPa
80kPa
80kPa
100kPa
100kPa
10kPa
10kPa
With 50% of signal input
With 50% of signal input
Supply pressure: 0.2 MPa
Supply pressure: 0.2 MPa
Set pressure: 0.05 MPa
Set pressure: 0.05 MPa
With 50% of signal input
With 50% of signal input
Supply pressure: 0.6 MPa
Supply pressure: 0.6 MPa
Set pressure: 0.25 MPa
Set pressure: 0.25 MPa
Linearity
Linearity,
, Hyteresis
Hyteresis
0
0
2
25
5
5
50
0
7
75
5
–1
–1
–0.6
–0.6
–0.8
–0.8
–0.4
–0.4
–0.2
–0.2
0.6
0.6
0.4
0.4
0.2
0.2
0
0
0.8
0.8
1
1
100
100
O
O
u
u
t
t
p
p
u
u
t
t
d
d
e
e
v
v
i
i
a
a
t
t
i
i
o
o
n
n
f
f
a
a
c
c
t
t
o
o
r
r
(
(
%
%
F
F
. .
S
S
. .
)
)
Input signal (%F.S.)
Input signal (%F.S.)
Repeatability
Repeatability
1
1
2
2
3
4
3
4
–1
–1
–0.5
–0.5
0.5
0.5
0
0
1
1
5
5
O
O
u
u
t
t
p
p
u
u
t
t
d
d
e
e
v
v
i
i
a
a
t
t
i
i
o
o
n
n
f
f
a
a
c
c
t
t
o
o
r
r
(
(
%
%
F
F
. .
S
S
. .
)
)
Count
Count
Pressure Characteristics
Pressure Characteristics
0
0..2
2
0
0..3
3
0
0..4
4
0
0..5
5
0
0..6
6
0
0..7
7
0
0..8
8
0
0..9
9
–1
–1
–0.5
–0.5
0.5
0.5
0
0
1
1
1.0
1.0
O
O
u
u
t
t
p
p
u
u
t
t
d
d
e
e
v
v
i
i
a
a
t
t
i
i
o
o
n
n
f
f
a
a
c
c
t
t
o
o
r
r
(
(
%
%
F
F
. .
S
S
. .
)
)
Supply pressure (MPa)
Supply pressure (MPa)
Flow Characteristics
Flow Characteristics
0
0
2
2
1
1
3
3
4
4
5
5
6
6
0
0
100
100
200
200
500
500
400
400
300
300
600
600
7
7
S
S
e
e
t
t
p
p
r
r
e
e
s
s
s
s
u
u
r
r
e
e
(
(
k
k
P
P
a
a
)
)
Flow rate (L/min (ANR))
Flow rate (L/min (ANR))
100kPa
100kPa
200kPa
200kPa
300kPa
300kPa
400kPa
400kPa
500kPa
500kPa
50kPa
50kPa
Out
Out
Return
Return
Out
Out
Return
Return
Out
Out
Return
Return
Out
Out
Return
Return
Series ITV001
Series ITV001
Series ITV003
Series ITV003
161
161
Compact Electro-Pneumatic Regulator
Compact Electro-Pneumatic Regulator
Series
Series
ITV0000
ITV0000
A
A
l
l
p
p
h
h
a
a
b
b
e
e
t
t
i
i
c
c
a
a
l
l
I
I
n
n
d
d
e
e
x
x
L
L
e
e
n
n
g
g
t
t
h
h
M
M
e
e
a
a
s
s
u
u
r
r
i
i
n
n
g
g
/
/
C
C
o
o
u
u
n
n
t
t
e
e
r
r
S
S
t
t
a
a
t
t
i
i
c
c
E
E
l
l
e
e
c
c
t
t
r
r
i
i
c
c
i
i
t
t
y
y
E
E
l
l
i
i
m
m
i
i
n
n
a
a
t
t
i
i
o
o
n
n
E
E
q
q
u
u
i
i
p
p
m
m
e
e
n
n
t
t
R
R
e
e
d
d
u
u
c
c
e
e
d
d
-
-
w
w
i
i
r
r
i
i
n
n
g
g
F
F
i
i
e
e
l
l
d
d
b
b
u
u
s
s
S
S
y
y
s
s
t
t
e
e
m
m
P
P
o
o
s
s
i
i
t
t
i
i
o
o
n
n
D
D
e
e
t
t
e
e
c
c
t
t
i
i
o
o
n
n
S
S
w
w
i
i
t
t
c
c
h
h
F
F
l
l
o
o
w
w
S
S
e
e
n
n
s
s
o
o
r
r
P
P
r
r
e
e
s
s
s
s
u
u
r
r
e
e
C
C
o
o
n
n
t
t
r
r
o
o
l
l
P
P
r
r
e
e
s
s
s
s
u
u
r
r
e
e
S
S
e
e
n
n
s
s
o
o
r
r