2
2
PWR
PWR
ERR
ERR
Note) For dimensions of the
Note) For dimensions of the cable connector
cable connector, refer to single unit
, refer to single unit on page 188.
on page 188.
Dimensions
Dimensions
Single unit for manifold
Single unit for manifold
Note) When using under the conditions equivalent to IP65,
Note) When using under the conditions equivalent to IP65,
connect the fittings or tube to
connect the fittings or tube to the breathing hole prior
the breathing hole prior
to use. (For details, refer to "Specific Product Pre-
to use. (For details, refer to "Specific Product Pre-
cautions 1" on page 197)
cautions 1" on page 197)
Bushing assembly
Bushing assembly
OUT
OUT
x
x
5
5
8
8
1
15
5
1
15
5
18.5
18.5
26.5
26.5
2
2
. .
7
7
8
8
4
4
8
8
6
6
3.7
3.7
50
50
56
56
9
9
M8 x 1
M8 x 1
Cable connection thread
Cable connection thread
Breathing hole
Breathing hole
(M3 x 0.5)
(M3 x 0.5)
OUT port
OUT port
(ø4, ø5/32")
(ø4, ø5/32")
Note)
Note)
189
189
Compact Vacuum Regulator
Compact Vacuum Regulator
Series
Series
ITV009
ITV009
A
A
l
l
p
p
h
h
a
a
b
b
e
e
t
t
i
i
c
c
a
a
l
l
I
I
n
n
d
d
e
e
x
x
L
L
e
e
n
n
g
g
t
t
h
h
M
M
e
e
a
a
s
s
u
u
r
r
i
i
n
n
g
g
/
/
C
C
o
o
u
u
n
n
t
t
e
e
r
r
S
S
t
t
a
a
t
t
i
i
c
c
E
E
l
l
e
e
c
c
t
t
r
r
i
i
c
c
i
i
t
t
y
y
E
E
l
l
i
i
m
m
i
i
n
n
a
a
t
t
i
i
o
o
n
n
E
E
q
q
u
u
i
i
p
p
m
m
e
e
n
n
t
t
R
R
e
e
d
d
u
u
c
c
e
e
d
d
-
-
w
w
i
i
r
r
i
i
n
n
g
g
F
F
i
i
e
e
l
l
d
d
b
b
u
u
s
s
S
S
y
y
s
s
t
t
e
e
m
m
P
P
o
o
s
s
i
i
t
t
i
i
o
o
n
n
D
D
e
e
t
t
e
e
c
c
t
t
i
i
o
o
n
n
S
S
w
w
i
i
t
t
c
c
h
h
F
F
l
l
o
o
w
w
S
S
e
e
n
n
s
s
o
o
r
r
P
P
r
r
e
e
s
s
s
s
u
u
r
r
e
e
C
C
o
o
n
n
t
t
r
r
o
o
l
l
P
P
r
r
e
e
s
s
s
s
u
u
r
r
e
e
S
S
e
e
n
n
s
s
o
o
r
r