11
Signametrics
[2] Available only with the SMU2064.
2.3 Resistance Measurements
Input Characteristics
Number of Current Sources
seven in SMU2064, five in the SMU2060
Burden Voltage
240mV or 2.4V max, depending on range.
Range
Full Scale Reading
Resolution
Test current
Maximum Test Voltage (at Full Scale)
24
[1]
24.000000
1
10 mA
240mV
240
240.00000
10
1 mA
240mV
2.4 k
2.4000000 k
100
1 mA
2.4V
24 k
24.000000 k
1
m
100
A
2.4V
240 k
240.00000 k
10
m
10
A
2.4V
2.4 M
2.4000000 M
100
m
1
A
2.4V
24 M
24.0000 M
100
100 nA
2.4V
240 M
[1]
240.000 M
1
k
4 nA
1.0V
[1] Ranges are only available in the SMU2064.
2.3.1 2-wire
Accuracy ± (% of r
) [1]
Range
24 hours 23
C
1
C
90 Days 23
C
5
C
One Year 23
C
5
C
24
0.0038 + 1.4 m
[2]
0.005 + 1.6 m
[2]
0.008 + 2 m
[2]
240
0.0037 + 4.5 m
[2]
0.0046 + 5 m
[2]
0.007 + 6 m
[2]
2.4 k
0.0023 + 28 m
0.004 + 32 m
0.006 + 33 m
24 k
0.0025 + 300 m
0.004 + 330 m
0.006 + 350 m
240 k
0.0055 + 3.2
0.006 + 4
0.007 + 5
2.4 M
0.018 + 40
0.03 + 50
0.04 + 70
24 M
0.12 + 400
0.13 + 500
0.2 + 600
240 M
0.8 + 20 k
1.0 + 30 k
1.3 + 50 k
[1] With Aperture set to
≥
0.5 Sec, and within one hour from Self Calibration (S-Cal).
[2] Use of S-Cal and Relative to improve measurement floor.
2.3.2 4-wire
Accuracy ± (% of r
) [1]
Range Maximum
Lead
Resistance
24 hours
23
C
1
C
90 Days
23
C
5
C
One Year
23
C
5
C
24
50
0.0038 + 0.7 m
[2]
0.005 + 0.8 m
[2]
0.008 + 1 m
[2]
240
500
0.0037 + 3 m
[2]
0.0046 + 4 m
[2]
0.007 + 5 m
[2]
2.4 k
500
0.0023 + 28 m
0.004 + 32 m
0.006 + 33 m
24 k
5 k
0.0025 + 300 m
0.004 + 330 m
0.006 + 350 m
240 k
50k
0.0055 + 3.2
0.007 + 4
0.007 + 5
2.4 M
50 k
0.018 + 40
0.03 + 50
0.04 + 70
24 M
50 k
0.12 + 400
0.13 + 500
0.2 + 600
[1] With Aperture set to
≥
0.5 Sec, and within one hour from Self Calibration (S-Cal).
[2] Use of Relative to facilitate indicated floor (adder part of spec).
2.3.3 6-wire Guarded Resistance Measurement (SMU2064)
This is an in-circuit forced guard measurement method, as implemented in ICT testers. Add this typical
additional error to the above specification.
Accuracy ± (% of r
)
Range
Max Guard forced current
One Year 23
C
5
C [1] (adder)
24
20 mA
0.3 + 4 m
240
20 mA
0.003 + 20 m
2.4 k
20 mA
0.005 + 100 m
24 k
100
A
0.03 + 1
240 k
10
A
0.35 + 10
24 M
1
A
0.85 + 1000
[1] This table should be used in conjunction with the 2-wire and 4-wire table above.
