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FS4100 User Manual

MEMS mass flow sensors

©2021 Siargo Ltd.

VA.0

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Summary of Contents for FS4100 Series

Page 1: ...FS4100 User Manual MEMS mass flow sensors 2021 Siargo Ltd VA 0...

Page 2: ...N1 EN Issue date 2021 08 Revision VA 0 Siargo Ltd 3100 De La Cruz Boulevard Suite 210 Santa Clara CA 95054 USA Tel 1 408 969 0368 Email info siargo com Copyright 2021 by Siargo Ltd Siargo Ltd and its...

Page 3: ...vibration environment Use this product according to the specified parameters Only the trained or qualified personnel shall be allowed to perform product services Be cautious for the electrical safety...

Page 4: ...the product specifications 11 5 2 Check the leakage 11 5 3 Power the product and digital data connection 11 5 4 RS485 Modbus communication protocol 12 5 4 1 Hardware connection 12 5 4 2 Communication...

Page 5: ...s for the best performance of the product 20 8 2 1 Comparison with a third party reference meter 20 8 2 2 Particle contamination and fluidic cleanness 21 8 2 3 Apply to a different gas medium 21 9 Tro...

Page 6: ...g of up to 0 5 MPa 5 bar or 73 PSI and a compensated temperature ranging from 10 to 55 C The products are designed with an easy change of mechanical connectors The standard connectors are BSPT 1 4 or...

Page 7: ...ind the product The power and data cable part number SN5 50 as shown below may also be found according to the same packing materials Figure 2 1 FS4100 flow sensor Figure 2 2 power and data cable SN5 5...

Page 8: ...sitions compatible connector with a length of 0 5 meters 2 The RS485 Modbus is asynchronous half duplex communication When the data are transmitted or received from the product the other pin is servin...

Page 9: ...dimensions Figure 3 3 FS4100 dimensions with BSPT 1 4 R 1 4 connectors Figure 3 4 FS4100 dimensions with one touch connectors Note Other threads or compressive types can be customized The mounting sc...

Page 10: ...nstallation of the product please ensure that the pipe debris or particles or any other foreign materials are completed removed c Close the upstream valve if any completely d During installation pleas...

Page 11: ...is properly done per the instructions c Make sure no mechanical stresses in the connections d The strong electromagnetic interference sources close by or any mechanical shocks at the pipeline may als...

Page 12: ...For the best performance of the product it is advised that the gas to be measured must be clean and free of particles or other foreign materials 5 2 Check the leakage Check gas leakage before any meas...

Page 13: ...cable connection 5 4 1 Hardware connection The RS485 hardware layer is TIA EIA 485 A as illustrated below In this configuration the product FS4100 is a slave Figure 5 1 RS485 hardware 5 4 2 Communica...

Page 14: ...tion codes applied for the product are the sub class of the standard Modbus function codes These codes are used to set or read the registers of the product Table 5 3 function codes Code Name Functions...

Page 15: ...Description Address of the product Value type UINT 16 Notes Values from 1 to 255 except for 157 0x9d 0 is the broadcast address SN Serial number 0x0030 Write N Read Y Description Series Number of the...

Page 16: ...00 msec Offset calibration 0x00F0 Write Y Read N Description Reset or calibrate the offset Value type UINT 16 Fixed value 0xAA55 Notes To reset or calibrate the offset write 0xAA55 to register 0x00F0...

Page 17: ...e 5 5 FS4100 analog output Figure 5 2 FS4100 analog output 5 6 Pressure loss The product is designed for low pressure loss The major drop of the pressure is at the manual valve structure The following...

Page 18: ...100 User Manual 17 P a g e Table 5 7 FS4108 pressure loss Flow rate SLPM Pressure loss Pa PSI 0 0 0 o 5 0 8 0 001 10 0 25 0 004 20 0 90 0 013 30 0 200 0 029 40 0 370 0 054 50 0 580 0 084 Figure 5 4 FS...

Page 19: ...siargo com or the sales office For large quantities please contact the sales office distributors or sales representatives Siargo is making every effort to ensure the quality of the products In case o...

Page 20: ...ssure 0 5 MPa Response time 10 default 20 50 100 200 500 1000 programmable msec Filter depth 0 default 4 255 programmable msec Humidity 95 no condensation RH Power supply 8 24 50 mA Vdc Analog output...

Page 21: ...ifies the process control with a high precision easy maintainence and very cost effective Please refer to the company s US patents and other publications made available to the public for additional in...

Page 22: ...gas medium The product is calibrated with a high precision NIST traceable metrological standard with clean and dry air Thanks to the unique thermal time of flight sensing technology the sensor can be...

Page 23: ...gging Check flow and contamination Power regulator failure Return to factory Sensor failure Return to factory Large errors or unexpected flow rate Particles fluid type Check system Erroneous or large...

Page 24: ...nstallation etc other consequential or indirect damages of any kind To the extent permitted by law the exclusive remedy of the user or purchaser and the limit of Siargo s liability for any and all los...

Page 25: ...r dismantled for whatever reasons 4 Products that have been subject to working conditions beyond the technical specification as described by this manual or related datasheet published by the manufactu...

Page 26: ...d to your request in a timely fashion and will work with you toward your complete satisfaction Customer service and all orders should be addressed to Siargo Ltd 3100 De La Cruz Boulevard Suite 210 San...

Page 27: ...r further analysis It can read from up to 128 sensors with the RS485 interface in serial For further information and purchase of the evaluation kit please contact the manufacturer or the sales represe...

Page 28: ...FS4100 User Manual 27 P a g e Appendix II Document history Revision A 0 August 2021 First release Sales Europe IDENTIC GmbH In der Siedlerruh 24 69123 Heidelberg Germany Phone 49 6221 7509 777 Email i...

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