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4.4 Valve Controller
Valve Controller is used for selecting working status of MFC. When MFC is operated normally, it should be
“Valve Control”. If MFC valve need to be full opened, it should be “Purge”. MFC valve will be closed if it is
“OFF”. Caution: This function can be only available for D07 series MFC without any problems. For other MFC
products, please do NOT connect “ Valve Control” pin.
4.5 Zero Potentiometer
“Zero Potentiometer” can only adjust zero in a small range for D07 series MFC/MFM products. It will be useless
for other MFC products.
4.6 Setting Potentiometer
The user can use “setting potentiometer’ to send the voltage (0-5V) to MFC for setpoints.
4.7 Power Supply Switch
Power on or off the box.
4.8 Power Supply Connector
AC
(
~220V
±
10% 50Hz
)
should be imported by this connector.
4.9 Fuse
1A fuse tube is used. Please check the fuse if power of the box failure.
4.10 Setting Selection
“Setting selection” is used for selecting where the setting signal comes from. If it is set to “INT”, the “setting
potentiometer” of the box will control the MFC. Comparably if it is set to “EXT”, the control signal of MFC will
come from the “EXT control connector”.
4.11 MFC “D” Connector
15pin D connector is used for connection with the MFC/MFM. Every connector (channel) can only be connected to
one MFC. Thus, two channel for D08-2F, three channel for D08-3F, and four channel for D08-4F.
4.12 External Control Connector
The 0-5V voltage can be used for external control signal Please refer table 3 for connection.
4.13 Nameplate