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6. OPERATION PROCEDURE
6.1 Preparation
6.1.1 Control Button
a. Power Supply: OFF
b. Valve Controller: OFF
c. Setting Potentiometer: Minimum
d. Internal & External Setting Selection
If setting potentiometer of the box will control MFC directly, the selection should be “INT” (internal setting). If
controlled by the computer, the selection should be “EXT”(external setting).
Signals Instruction of Table 3:
a. The voltages between External Set
Ⅰ～Ⅳ
and signal common will be used for setting
the 1
～
4 channel MFC respectively. If external potentiometer is used for setting, a 3.3K
potentiometer can be connected with “+5.00V” and “ Signal common”,
and its tap can be
connected with “
External Set
”.
The user can connect D/A of computer to external control
connector for the automatic control. Please make sure input impedance should be more
than 10K
Ω
.
b. 0
～
+5V voltage signals from flow readout
Ⅰ～Ⅳ
will indicate the flow rate from
channel I~IV respectively.
c. Valve Override
Ⅰ～Ⅳ
are ONLY available for D07 series MFC products without any
problems. If valve Override is connected to +15V, valves will be shut off. If valve
Override is connected to -15V, valves will be full opened. Valves will be in the automatic
control status if valve Override is not connected. Caution: if the user wants to use external
(PC control) function, “ Valve Controller ” switch should be in the middle.
