SENSIRION SFC53 Series Manual Download Page 9 | Manualshive

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SENSIRION SFC53 Series Manual Download Page 9

www.sensirion.com

Version 1.0

–

Aug 2022

9 / 11

Copyright © Sensirion AG 2022.

Reference and Flow Conversions between mass and

volumetric flow

Introduction video: SFC5500 Mass Flow Controllers

Table 3 Datasheets, CAD models and O-ring recommendations

Product

reference

Datasheet

CAD model

Downmount

manifold

CAD model

Downmount

recommended

O-ring

SFC5500/

SFM5500-

200slm

sensirion.com/resource

/datasheet/sfc5500

sensirion.com/resource

/cad/sfc5500-200

SFC5500/

SFM5500-

50sccm

0.5slm

2slm

10slm

sensirion.com/resource

SFC5400/

SFM5400

sensirion.com/resource

/datasheet/sfc5400

sensirion.com/resource

sensirion.com/media/d

ocuments/Mounting_p

late_SFX54xx.step

NORMATEC O-ring

FKM NT 80.7/75 OR

2019 inner Ø 4,76 x

1,78 mm

SFC5460/

SFM5460

https://sensirion.com/r

esource/datasheet/sfc5

https://sensirion.com/r

esource/cad/downmou

nt_SFC5460_SFM5460

SFC5300/

SFM5300

sensirion.com/resource

/datasheet/sfc53x0_sf

sensirion.com/resource

sensirion.com/media/d

ocument/Mounting_pl

Defined by the design

of the manifold

(customer)

SFC5330/

SFM5330

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Summary of Contents for SFC53 Series

Page 1: ...SFM5xxx Summary This guide provides recommendations for evaluation testing and integration of Sensirion Mass Flow Controllers and Meters It is applicable to SFC55xx SFC54xx SFC53xx as well as SFM55xx...

Page 2: ...recommendations 4 4 Common pitfalls 5 4 1 Flow appears to be off by several 5 4 2 Settling time is longer than specified 5 5 Design recommendations 5 5 1 Pressure drop and input pressure 5 6 Fluidic a...

Page 3: ...aluate all digital Mass Flow Controllers with a DB9 plug an adapter is available for other plugs please contact Sensirion EK F5x is available from distribution Please note Mass Flow Controller is not...

Page 4: ...ero flow It is possible to use Sensirion recalibration software to compensate for that effect The Recalibration software can be downloaded from the Sensirion website and is also linked in the Useful r...

Page 5: ...The settling time of Sensirion s Mass Flow Controllers is specified for a step answer from 10 to 100 of full scale within 5 of setpoint When testing the settling time do not do so from a position of z...

Page 6: ...ic manifold must be designed and manufactured by the user In Table 4 in the Useful resources Section 8 1 CAD models for a suggested manifold designs for SFC54xx SFM54xx and SFC53xx SFM53xx can be foun...

Page 7: ...ssure 4 bar at inlet and atmospheric pressure at outlet any situation which leads to the factory calibration requiring adjustments due to the accuracy requirements e g vertical instead of horizontal i...

Page 8: ...ass Flow Controllers SFC sensirion com products product categories mass flow controllers Mass Flow Meters SFM sensirion com products product categories gas flow sensors General technical download sect...

Page 9: ...SFC5500 SFM5500 50sccm 0 5slm 2slm 10slm sensirion com resource cad sfc5500 SFC5400 SFM5400 sensirion com resource datasheet sfc5400 sensirion com resource cad sfc5400 sensirion com media d ocuments...

Page 10: ...to the stability of the MEMS based sensor element and the robust mechanical design Sensirion Mass Flow Controllers do not drift and do not require recalibration in the field High manufacturing standar...

Page 11: ...er s expense and the warranty period for any repaired or replaced product shall be limited to the unexpired portion of the original period This warranty does not apply to any equipment which has not b...

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