5
IG2 Introduc�on
This manual provides informa�on about the IG2 Ion Source Package, which comprises the Model 04
-
165 2 kV Backfill Ion Source and the Model 32
-17
5 Ion Source Control, as well as addi�onal op�ons
available for the IG2.
The RBD 04
-
165 Ion Source is interchangeable with the PHI® 04
-
161 and 04
-
162 ion guns. The RBD
32-17
5 Ion Source Control is interchangeable with the PHI® 20
-
045 control. As a result, the RBD
Model 04
-
165 works with the PHI 20
-
045, and the PHI 04
-
161 and 04
-
162 ion guns work with the
RBD Model 32
-17
5. This manual discusses the op�ons available for the IG2, the items required to use
RBD’s components with corresponding PHI components, as well as differences in opera�on or other
aspects of a component’s use.
RBD Model 04-
165 2 kV Backfill Ion Source
The Model 04
-
165 2 kV Backfill Ion Source generates an energe�c inert gas ion beam for sputer
-
etching solid surfaces. The source requires a sta�c pressure of 5x10
-5
torr with an inert gas such as
argon. Ions are generated by electron impact within the ion source’s dual filament ioniza�on
chamber and are then focused at the target with energies of up to 2
K
eV. The impurity content of the
ion beam is minimized by using an off
-
axis filament geometry. A focusing lens permits high ion
current density to be obtained for a given opera�ng pressure and source
-to-
sample distance. A dual
tungsten filament assembly permits con�nued opera�on when the first filament opens. The
expected life�me of the filament assembly is several years under normal usage at the recommended
opera�ng condi�ons. The filament assembly is easily replaced in the field.
The 04
-
165 fits on a standard 2.75" flange, which has a 1.35" ID and a 1.5" OD.
04-165 Specifications
Specification
Description
Source Type
Hot
filament
electron
impact
(dual
filament,
backfill
type)
Beam Energy
.5
kV
to 2
kV
Minimum Beam Diameter
»
at 25 mm working distance
2.5
mm
FWHM
(at target)
»
at 50 mm working distance
3.5
mm
FWHM
(at target)
Maximum Total Target Current
≥10
μA
at
V
B
= 2
kV.
Maximum Current Density
»
at 25 mm working distance
≥200
μA/cm
2
when
V
B
= 2
kV
»
at 50 mm working distance
≥100
μA/cm
2
when
V
B
= 2
kV
Mounting
Standard
2.75"
CF
bored
flange
OD,
1.35"
ID
minimum
tube required
Flange to End of Optics
7.00"
or
9.25"
(2.25"
less
with
optional
x
-
y
aligner)
Working Distance
Typically
50
mm
end-
of
-optics-to-
target
