RAYLASE SUPERSCAN II, Manual

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03/2014 SUPERSCAN-IIE
SUPERSCAN-IIE
General Specifications
Power
Supply
Voltage ±15 to ±18 V
Typical Deflection (optical) ±0.393 rad
Resolution optically 12 µ rad
Current 3 A, RMS, max. 10 A Repeatability (RMS) 2 µ rad
Ripple /
Noise Max. 200 mVpp, @ 20 MHz
bandwidth
Max. Gaindrift
1)
< 15 ppm/K
Max. Offsetdrift
1)
< 10 µ rad/K
Ambient Temperature +15 to +35 °C Long-term Drift
1), 2)
< 150 µ rad
Storage Temperature -10 to +60 °C
Long-term Drift with water tempering [W]
[W2]
1), 2)
< 100 µ rad
Humidity ≤ 80 % non-condensing Position noise (RMS) < 10 µ rad
Interface Signals Digital XY2-100 Protocol Auto-calibration option:
Position Accuracy
3)
< 50 µ rad/K
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water 1K < 3) depending on
the interval between auto-calibration cycles
Aperture Dependent Specifications – Mechanical Data
SS-IIE-10 SS-IIE-12 SS-IIE-15 SS-II-20 SS-IIE-20 L SS-IIE-30
Input Aperture [mm] 10.0 12.0 15,0 20.0 20.0 30.0
Beam Displacement [mm] 12.4 14.0 18.55/18.05
1
26.28/25.63
1
26.28/25.63
1
35.98/35.38
1
Weight, without objective [kg] approx. 3.3 approx. 3.3 approx. 3.3 approx. 3.3 approx. 5.9 approx. 5.9
Dimension (mm) (L x W x H)
170 x 125 x
117.5
170 x 125 x
117.5
170 x 125 x
117.5
170 x 125 x
117.5
203 x 159 x
150/160.5
2
203 x 159 x
150/160.5
2
1) Specification for fused Silica mirrors, 2) AXIALSCAN variation only, additional output plate for protection window
Aperture Dependent Specifications - Mirror Variations
Wavelengths SS-II-10 SS-II-12 SS-II-15 SS-II-20 SS-II-30
355 nm SI SI QU, SI QU,
532 nm SI SI QU, SI, BE QU, SI, BE QU
780 - 980 nm + AL QU QU QU
1064 nm SI SI QU, SI, BE QU, SI, BE QU, SI, SC, BE
900 - 1100 nm + AL SC
1060 – 1080 nm QU, SC
10600 nm SI SI SI,BE SI, BE SI, SC, BE
Standard: QU = Quarz (Fused Silica), SI = Silicium - High Speed: SC = Silicium Carbid, BE = Beryllium
Type Dependent Specifications – Tuning:
Tuning Description
LN Low Noise
RA Short acceleration time
Type Dependent Specifications – Dynamic Data
SS-IIE-10 SS-IIE-12 SS-IIE-15
Mirror Type SI SI QU BE
Tuning LN RA RA LN RA L N RA
Acceleration Time [ms] ≤ 0.30 ≤ 0.19 ≤ 0.25 ≤ 0.55 ≤ 0.36 ≤ 0.40 ≤ 0.24
Writing Speed [cps]
1), 2)
600 800 650 350 435 450 615
Positioning Speed [m/s]
1)
16.0 10.0 9.0 8.0 6.0 12.0 9.0
SS-IIE-20 / SS-IIE-20 L SS-IIE-30
Mirror Type QU SI BE QU SI SiC BE
Tuning RA RA RA RA RA RA RA
Acceleration Time [ms] ≤ 0.58 ≤ 0.61 ≤ 0.40 ≤ 0.9 ≤ 0.84 ≤ 0.52 ≤ 0.50
Writing Speed [cps]
1), 2)
350 350 450 - - - -
Positioning Speed [m/s]
1)
6.0 6.0 7.0 4.0 5.0 6.0 6.0
1) With F-Theta Lens f=160 / field size 110 mm x 110 mm, 2) Single-stroke font with 1 mm height.