Quorum SC7610, Operating Manual, Page: 4 / 31

Contents
OM-SC7610
SC7610 Sputter Coater 4 Issue 1
1.2 Chapter Contents
Chapter 1 - Contents ................................................................................................ 3
1.1 Manual Layout ................................................................................ 3
1.2 Chapter Contents ........................................................................... 4
1.3 Illustrations ..................................................................................... 6
1.4 Tables ............................................................................................ 6
Chapter 2 - Health and Safety ................................................................................. 7
2.1 Control of Substances Hazardous to Health (COSHH) ................. 7
2.2 Safety Policy ................................................................................... 7
2.3 Conformity ...................................................................................... 7
2.4 Servicing ........................................................................................ 8
2.4.1 Disclaimer ............................................................................... 8
2.4.2 Operators and Service Engineers .......................................... 8
2.5 Hazard Signals and Signs .............................................................. 8
2.5.1 Hazard Signal Words ............................................................. 8
2.5.2 Hazard Labels used on Equipment ........................................ 8
2.5.3 Hazard Warning Labels used in Equipment Manuals ............ 9
2.5.4 Instrument Functionality Signs ............................................... 9
2.5.5 Serious Damage to Instruments ............................................. 9
2.5.6 Hazard to Operator ................................................................. 9
2.6 Risk Analysis .................................................................................. 10
2.6.1 Personal Operational Risks .................................................... 10
2.6.2 Hazardous Materials ............................................................... 10
2.7 Good Working Practices ................................................................ 11
2.8 SC7610 Sputter Coater Specific Safety Hazards ........................... 11
2.8.1 Contamination ........................................................................ 11
Chapter 3 - Introduction............................................................................................ 12
3.1 Return of Goods.............................................................................. 12
3.2 Returns Procedure .......................................................................... 12
Chapter 4 - Description ............................................................................................ 13
4.1 Equipment ...................................................................................... 13
4.1.1 Optional Items ........................................................................ 13
4.1.2 Accessories ............................................................................ 13
4.2 Overview ........................................................................................ 14
4.3 Technical Specification .................................................................. 14
4.3.1 SC7610 Sputter Coater Specification ..................................... 14
4.4 Physical Description ....................................................................... 15
4.4.1 Operational Description .......................................................... 16
4.4.2 Pumping Requirements .......................................................... 16
4.5 Interlocks ........................................................................................ 16
4.6 SC7610 Panel Details .................................................................... 17
4.6.1 SC7610, Front Panel Controls ................................................ 17
4.6.2 SC7610, Rear Panel Connections .......................................... 18
Chapter 5 - Installation ............................................................................................. 19
5.1 Unpacking Checklist ...................................................................... 19
5.1.1 Preparation ............................................................................. 19
5.2 SC7610 Installation ........................................................................ 20
5.2.1 Connections ............................................................................ 20