Quorum SC7610, Operating Manual, Page: 24 / 31

Operation
OM-SC7610
SC7610 Sputter Coater 24 Issue 1
(b) Preparation
(i) Check that LEAK and VENT valves are closed, (fully clockwise).
(ii) Check the argon cylinder regulator is open. Set pressure to 0.7 bar (5-10psi).
(iii) Set TIME control to required setting, say 120 seconds (the time required is process
dependent).
(iv) Check that mains power is available, set the rear panel mounted POWER ON/OFF
switch to the down position (ON).
(c) Set vacuum pressure
(i) Operate the START PUMP button, the rotary pump will start and the reducing pressure
will be indicated on the
CHAMBER PRESSURE meter.
(ii) When the pressure reaches 0.1 mbar, partially open the LEAK valve to flush the
vacuum system with Argon. During flushing, allow the pressure to rise to between 0.5
and 1 mbar for 10-15 seconds. Close the LEAK valve and allow vacuum chamber
pressure to recover to better than 4 x 10
-2
mbar.
(d) Set process current
Open the LEAK valve and monitor the vacuum pressure. When the pressure begins to rise,
intermittently operate the SET PLASMA button continuing to adjust the LEAK valve. The
PROCESS CURRENT meter will register the current flow. Open or close the LEAK valve to
adjust the current to 18mA. Release the SET PLASMA button.
(e) Sputter processing
(i) Operate the START PROCESS button, the sputtering process will commence and a
blue coloured discharge glow will be visible in chamber. Gold-palladium or other target
material will be sputtered onto the samples for the set time period, then the discharge
will cease.
(ii) For a thicker coating, repeat (e (i) above).
(f) Remove Specimens
(i) Close the LEAK valve to shut off the flow of argon to the chamber.
(ii) Operate the START PUMP button, the indicator will extinguish and the rotary pump will
be turned OFF .
(iii) Open the VENT valve to admit gas to the chamber.
(iv) When the chamber pressure returns to atmosphere, close the vent valve, lift the top
plate clear of the glass chamber.
(v) Remove the specimens.
(v) If further specimens are not to be coated immediately, close the top plate to seal the
chamber. (See Paragraph 6.3(a)-(v))