
MG14 operating manual Rev 1.4
9
2.3.2 Sensor Supply
2.3.2.1 IONIVAC Sensors
Measuring operation:
Universal
Bayard-Alpert
gauge
IE 414
Bayard-Alpert
gauge
IE 515
Extractor
gauge
Tol
Anode potential:
Reflector potential:
Cathode potential:
Emission current:
(selectable)
180V
------
30V
0,1 mA
1 mA
4 mA
10 mA
220V
------
80V
0,1 mA
1 mA
4 mA
10 mA
220V
205V
100V
1,6 mA
± 1%
± 1%
± 1%
± 5%
± 1%
± 1%
± 1%
Degassing:
Universal
Bayard-Alpert
gauge
IE 414
Bayard-Alpert
gauge
IE 515
Extractor
gauge
Tol
Anode potential:
Reflector potential:
Cathode potential:
Emission current:
Power:
Degas timer:
500V
------
90V
max 80 mA
adjustable
max 40W
adjustable
1-20 min
480V
------
20V
max 80 mA
adjustable
max 40W
adjustable
1-20 min
480V
205V
10V
max 80 mA
adjustable
max 40W
adjustable
1-20 min
± 1%
± 1%
± 1%
± 5%
± 1%
± 1%
2.3.2.2 THERMOVAC, CERAVAC and IONIVAC Transmitters
V24 VDC ±5%
Current 0.1 A Thermovac, Ceravac; 1,2A IONIVAC ITR90, ITR100
2.3.3 Measuring Ranges
Total measuring range:
2x10
-12
to 1000 mbar
IONIVAC sensors:
Bayard-Alpert: 2x10
-11
….1x10
-3
mbar
Extractor: 2x10
-12
….1x10
-4
mbar
CERAVAC transmitters CTR 90 and CTR 91: 0.1 Torr: (CTR 91 only) 1x10
-5
….1x10
-1
Torr
1 Torr:
1x10
-4
…..1 Torr