3. Remove the electronic unit without exerting any rotary movement.
– The hood of the electronic unit cannot be removed.
4. Loosen the hexagon head set screw on the magnetic unit.
5. Remove the magnetic unit.
– Separation of the magnetic unit and measurement chamber is made more difficult due to the
effect of magnetic force and the tendency for them to tilt easily.
6. Remove the circlip and the pin insert from the measurement chamber.
7. Remove the interior hexagon socket screws and the lock washers from the rear of the measure-
ment chamber.
8. Remove the following in succession, with the necessary care, and without applying any force to
the Pirani measuring element
● Compression piece
● Complete anode
● FPM seal incl. inner ring
● Pirani measuring element with FPM seal
8.3 Cleaning components
DANGER
Electric shock due to moisture entering the unit
Water that has entered the unit will result in personal injury through electric shocks.
► Only operate the unit in a dry environment.
► Operate the unit away from fluids and sources of moisture.
► Do not switch on the unit if fluid has entered it. Instead contact Pfeiffer Vacuum Service.
► Always disconnect the power supply before cleaning the unit.
WARNING
Health hazards due to cleaning agent
The cleaning agent being used causes health hazards which could include, for example, poisoning,
allergies, skin irritations, chemical burns or damage to the airways.
► When handling cleaning agents, observe the applicable regulations.
► Adhere to safety measures regarding handling and disposal of cleaning agents.
► Be aware of potential reactions with product materials.
NOTICE
Damage caused by penetrating moisture
Penetrating moisture, e.g. through condensation or dripping water, damages the device.
► Protect the device against moisture penetrating.
► Only operate the device in a clean and dry environment.
► Operate the device away from fluids and humidity sources.
► Take special precautions if there is a risk of dripping water.
► Do not switch on the device if fluid has penetrated into it, instead contact the Pfeiffer Vacuum
Service Center.
NOTICE
Damage caused by unsuitable cleaning agents
Unsuitable cleaning agents damage the product.
► Do not use solvents as they attack the surface.
► Do not use any aggressive or abrasive cleaning agents.
Cleaning the measurement chamber
Pfeiffer Vacuum recommends replacing the Pirani measuring element when cleaning the
measurement chamber.
Maintenance
32/50
