16
2.5
Typical applications (Overview)
A broad range of possible applications is available to this highly precise sensor.
The CHRocodile C is the most compact sensor based on confocal chromatic imaging principle. This
sensor is perfectly suitable for demanding measuring tasks, like non-contact measurement of
microtopography, layer thickness measurements. It could be used both on various reflecting and
scattering surfaces.
The PRECITEC confocal chromatic compact sensor is very well adapted to industrial environment, as
no optical cable are connected to the CHRocodile C unit. The absence of optical cables, promotes
robustness and compactness of the measuring device, and also facilitates the integration and use on
a motorized moving system, such as a coordinate measuring machine (CMM). Then this new type of
sensor overcomes the industrial constraints induced by fiber optic cables that are known to deteriorate
when the measuring device is subject to high accelerations and / or rotational movements.
The CHRocodile C offers the ability to perform fast and accurate metrological control of production, by
being built on automatic or semi-automatic inspection machines, or by being directly integrated on
production line for 100% inspection of manufactured parts. In this, this new technology fully meets the
current needs of the industry as it is suitable for many applications:
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The measurement of wafer in the field of semiconductor and generally microelectronics,
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The measurement and online control of mechanical or optical parts,
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Or even the measurement and control of glass or plastic film thickness.
Other fields of applications exist, the common point is to seek a cost effective measurement system
going, more and more compact, as flexible as possible, and highly accurate. It is the case in laboratory
environment and even more in industrial environment. It appears clearly here that the CHRocodile C
unit of measurement meet these different needs.
Optical Head
Application
Probe
200µm
Probe
1mm
Probe
4mm
Probe
10mm
Electronics
Micro-Electronics
Mechanics
Micro-Mechanics
Optics
Micro-Optics
Shape
Flatness
Roughness
Plastic and glass thickness
Thin film thickness
Coating thickness
Table 2.1:
Sensor applications
Summary of Contents for CHRocodile C
Page 3: ...3 Version Control Version Manual Date Type of Change 1 0 0 0 2016 09 20 Original edition...
Page 13: ...13 Fig 2 2 Chromatic Confocal Imaging principle point sensor...
Page 57: ...64 Appendix 2 Mechanical Plans 1 Optical probe mechanical plans b Probe 1mm a Probe 0 2mm...
Page 58: ...65 Fig A2 1 Optical Head Mechanical plans a 0 2mm b 1mm c 4mm d 10mm c Probe 4mm d Probe 10mm...
Page 59: ...66 2 CHRocodile C unit mechanical plans Fig A2 2 CHRocodile C sensor unit mechanical plans...