12
Technical Data
12.1
Specifications
Motion
V-412.03
V-412.05
V-412.09
V-412.13
Unit
Toler-
ance
Active axes
X
X
X
X
Travel range
52
102
204
305
mm
Pitch / yaw
±9
±14
±19
±29
μrad
max.
Straightness / flat-
ness
±1.5
±2.5
±4
±6
μm
max.
Velocity, unloaded 2000
2000
2000
2000
mm/s max.
Positioning accura-
cy, uncalibrated
±3
±4
±8
±10
μm
typ.
Motion
V-412.17
V-412.21
V-412.25
Unit
Toler-
ance
Active axes
X
X
X
Travel range
407
508
610
mm
Pitch / yaw
±39
±48
±58
μrad
max.
Straightness / flat-
ness
±8
±9
±10
μm
max.
Velocity, unloaded 2000
2000
2000
mm/s max.
Positioning accura-
cy, uncalibrated
±12
±14
±15
μm
typ.
Encoder options
V-412.xxx211Ex
Unit
Toler-
ance
Integrated sensor
Incremental linear encoder
Sensor signal
Sin/cos, 1 V peak-peak, 20 μm signal period
Design resolution
0.0003
μm
Minimum incremental mo-
tion
5
nm
typ.
Bidirectional repeatability
±0.5
μm
typ.
Limit switches
Hall effect, N/C contact, 5 V, NPN
12 TECHNICAL DATA
V412M0005EN
‒
3/27/2019
29
M O T I O N | P O S I T I O N I N G
