10 Technical Data
P611 Positioners
PZ253E
Version: 1.2.0
39
P611.3S
P611.3SF
P611.3O
P611.3OF
Unit Tolerance
Voltage connection
D-sub 25 (m)
D-sub 25 (m)
Sensor connection
D-sub 25 (m)
–
Recommended electronics
E-503, E-505, E-663,
E-664, E-727
E-503, E-505, E-663,
E-664, E-727
The resolution of the system is limited only by the noise of the amplifier and the measuring
technology because PI piezo nanopositioning systems are free of friction.
Adapter cables with LEMO connectors for sensor and operating voltage available.
P611.ZS
P611.Z0
Unit
Tolerance
Active axes
Z
Z
Motion and positioning
Integrated sensor
SGS
-
Travel range at -20 to +120 V,
open loop
120
120
µm
+20 % /
-0 %
Travel range, closed loop
100
-
µm
Resolution, open loop
0.2
0.2
nm
typ.
Resolution, closed loop
2
-
nm
typ.
Linearity error
0.1
-
%
typ.
Repeatability
<10
-
nm
typ.
Tilt
θ
Z
(motion in Z)
±5
±5
µrad
typ.
Tilt θ
X
(motion in Z)
±20
±20
µrad
typ.
Tilt θ
Y
(motion in Z)
±5
±5
µrad
typ.
Mechanical properties
Stiffness
0.45
0.45
N/µm
±20 %
Resonant frequency, no load
460
460
Hz
±20 %
Resonant frequency under load,
30 g
375
375
Hz
±20 %
Resonant frequency under load,
100 g
265
265
Hz
±20 %
Push/pull force capacity
15 / 10
15 / 10
N
max.
Drive properties
Ceramic type
PICMA® P-885
PICMA® P-885
Electrical capacitance
1.5
1.5
µF
±20 %
Miscellaneous
Operating temperature range
-20 to 80
-20 to 80
°C
Material
Aluminum, steel Aluminum, steel
Dimensions
44 mm × 44 mm
× 27 mm
44 mm × 44 mm
× 27 mm
Summary of Contents for P-611 Series
Page 8: ......
Page 12: ......
Page 20: ......
Page 32: ......
Page 34: ......
Page 38: ......
Page 47: ...10 Technical Data P 611 Positioners PZ253E Version 1 2 0 43 Figure 11 P 611 10 ...
Page 48: ...10 Technical Data 44 Version 1 2 0 PZ253E P 611 Positioners Figure 12 P 611 2S and P 611 20 ...
Page 49: ...10 Technical Data P 611 Positioners PZ253E Version 1 2 0 45 Figure 13 P 611 XZS and P 611 XZ0 ...
Page 51: ...10 Technical Data P 611 Positioners PZ253E Version 1 2 0 47 Figure 15 P 611 ZS ...
Page 52: ...10 Technical Data 48 Version 1 2 0 PZ253E P 611 Positioners Figure 16 P 611 Z0 ...
Page 56: ......
Page 58: ......