10 Technical Data
44
Version: 1.2.0
PZ244E
P54x Nanopositioner
Pin assignment for the P54x.TCD models:
Pin
Signal
Function
A1 inner conductor Output
Probe sensor signal, channel 2
(immovable part of the capacitive sensor)
A1 outer conductor GND
Shielding for probe sensor signal, channel 2
A2 inner conductor Output
Probe sensor signal, channel 3
(immovable part of the capacitive sensor)
A2 outer conductor GND
Shielding for probe sensor signal, channel 3
A3 inner conductor Output
Probe sensor signal, channel 1
(immovable part of the capacitive sensor)
A3 outer conductor GND
Shielding for probe sensor signal, channel 1
1
Input
Target sensor signal, channel 2
(movable part of the capacitive sensor)
2
Input
Target sensor signal, channel 3
(movable part of the capacitive sensor)
3
GND
ID chip ground
4
Bidirectional
Data line for ID chip
5
---
(not connected)
6
---
(not connected)
7
---
(not connected)
8
Input
Piezo v, channel 3
9
Input
Piezo v, channel 2
10
Input
Piezo v, channel 1
11
Input
Target sensor signal, channel 1
(movable part of the capacitive sensor)
12
GND
Shielding for target sensor signal, channel 2
13
GND
Shielding for target sensor signal, channel 3
14
---
(not connected)
15
---
(not connected)
16
---
(not connected)
17
---
(not connected)
18
---
(not connected)
19
Input
Piezo voltage –, channel 3
20
Input
Piezo voltage –, channel 2
21
Input
Piezo voltage –, channel 1
22
GND
Shielding for target sensor signal, channel 1
