PI P-54 Series, User Manual

Page: 40 / 51

10 Technical Data
36 Version: 1.2.0 PZ244E P­54x Nanopositioner
P­541.2CD /
P­541.2CL P­542.2CD /
P­542.2CL P­541.2DD P­541.2SL P­542.2SL P­541.20L /
P­542.20L Unit Tolerance
Drive properties
Piezo ceramic PICMA®
P-885
PICMA®
P-885
PICMA®
P-885
PICMA®
P-885
PICMA®
P-885
PICMA®
P-885
Electrical capacitance per
axis
4.2 7.5 9 4.2 7.5 4.2 / 7.5 µF ±20 %
Miscellaneous
ID chip functionality P-541.2CD P-542.2CD Yes – – –
Operating temperature
range
-20 to 80 -20 to 80 -20 to 80 -20 to 80 -20 to 80 -20 to 80 °C
Material Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum
Mass 0.75 0.75 0.75 0.73 0.73 0.7 kg ±5 %
Cable length 1.5 1.5 1.5 1.5 1.5 1.5 m ±10 mm
Sensor / voltage connection CD
versions:
D-sub
25W3 (m)
CL versions:
LEMO
CD
versions:
D-sub
25W3 (m)
CL versions:
LEMO
D-sub
25W3 (m)
LEMO LEMO LEMO (no
sensor)
Recommended electronics E-503,
E-505,
E-621,
E-712,
E-727
E-503,
E-505,
E-621,
E-712,
E-727
E-503,
E-505,
E-621,
E-712,
E-727
E-503,
E-505,
E-621,
E-712,
E-727
E-503,
E-505,
E-621,
E-712,
E-727
E-503,
E-505,
E-621,
E-712,
E-727
* With digital controller. With analog controllers, the typical linearity error for direct drive positioners can be up to 0.1 %.
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo
nanopositioning systems are free of friction.
All specifications based on room temperature (22 °C ±3 °C).
P­541.ZCD P­541.TCD* P­541.ZSL P­541.TSL* P­541.Z0L P­541.T0L* Unit Tolerance
Active axes Z Z, θ
X
, θ
Y
Z Z, θ
X
, θ
Y
Z Z, θ
X
, θ
Y
Motion and positioning
Integrated sensor Capacitive Capacitive SGS SGS – –
Travel range in Z at -20 to
120 V, open loop
150 150 150 150 150 150 µm +20 % /
-0 %
Tip/tilt angle in θ
X
, θ
Y
at -20
to 120 V, open loop
– ±0.6 – ±0.6 – ±0.6 mrad +20 % /
-0 %
Travel range in Z, closed
loop
100 100 100 100 – – µm
Tip/tilt angle in θ
X
, θ
Y
,
closed loop
– ±0.4 - ±0.4 – – mrad
Resolution Z, open loop 0.2 0.2 0.2 0.2 0.2 0.2 nm typ.
Resolution in θ
X
, θ
Y
, open
loop
– 0.02 – 0.02 – 0.02 µrad typ.
Resolution in Z, closed loop 0.5 0.5 2.5 2.5 – – nm typ.
Closed-loop resolution in
θ
X
, θ
Y
– 0.08 – 0.25 – – µrad typ.
Linearity error Z, θ
X
, θ
Y
0.03 0.03 0.2 0.2 – – % typ.
Repeatability Z <2 <2 <10 <10 – – nm typ.