Positioning
L-412.xx9025E1[B]
Tolerance
Integrated sensor
Absolute linear encoder
Bidirectional repeatabili-
ty in X
± 0.5 μm
Typ.
Positioning accuracy in
X, uncalibrated
xx = 03: ± 5 μm
xx = 05: ± 6 μm
xx = 09: ± 8 μm
xx = 13: ± 10 μm
xx = 17: ± 12 μm
xx = 21: ± 14 μm
xx = 25: ± 16 μm
Typ.
Minimum incremental
motion in X
0.05 μm
Typ.
Sensor signal
EnDat 2.2
Sensor resolution
1 nm
Motor encoder
Incremental rotary encoder
Resolution, motor en-
coder
20000 Cts./rev.
Motor encoder: Sensor
signal
A/B quadrature, RS-422
Drive properties
L-412.xx9025E1[B]
Tolerance
Drive type
Synchronous servo motor
Nominal voltage
320 V
Nominal current, RMS
2.73 A
Typ.
Peak current, RMS
10.9 A
Typ.
Drive force in negative
direction of motion in X
700 N
Typ.
Drive force in positive
direction of motion in X
700 N
Typ.
Torque constant
0.32 N·m/A
Typ.
Motor constant, rota-
tional
0.11 N·m/
√
W
Typ.
Resistance phase-phase 5.22
Ω
Typ.
Inductance phase-phase 9.7 mH
Back EMF, phase-phase,
rotational
20.4 V/kRPM
Max.
Number of pole pairs
3
12 TECHNICAL DATA
L412UM0002EN
‒
10/24/2022
31
M O T I O N | P O S I T I O N I N G
